High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Air Cylinder

, 45, 60 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CG3 JMB : Manufacture of intermediate strokes in 1 mm increments is possible.

Compact Hydraulic Cylinder

Made to Order Change of Rod End Shape 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end shape pattern symbol A1 A2 A3 C0.5 30 30 30 30 D D D d d F Width across flats F F H H H A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F H H H Note) Female thread effective depth should be no more

Free Mount Cylinder

30 CU D M9B 6 30 30 CDU With auto switch D Number of auto switches Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Built-in magnet 2 pcs. 1 pc.

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

Table of Contents

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

NCQ2/CQ2

Spring Extend C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Cylinder model Mounting bolt part no.

NCG/CG1

30 31 35.5 43 43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 24 24 25 29.5 37 37 D-H7

Rotary Actuator/Vane Type

to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 4.5 to 30 Symbol: A57 Symbol: A58 Both the long shaft and the short shaft are shortened.

Air Cylinder Series CM2

15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177 188 13.5 46.5 42.5 41.2

Free Mount Cylinder Series CU

D M9B 21 C D U 16 30 D M9B Cylinder stroke (mm) Copper, fluorine and silicon-free + low particle generation Number of auto switches 2 pcs. 1 pc. n pcs.

Compact Cylinder

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Smooth Cylinder/Low Speed Cylinder

30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

35 F 30 25 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 25 20 0.4 MPa 0.4 MPa 20 15 0.3 MPa 0.3 MPa 15 0.2 MPa 0.2 MPa 10 10 5 5 F F 0 0 5 5 20 25 30 35 10 15 10 15 20 25 30 35 Gripping point L (mm) Gripping point L (mm) Internal grip MHSH3-25D MHSH3-25D 70 70 60 60 Pressure 0.6 MPa 50 50 Gripping force (N) Gripping force (N) Pressure 0.6 MPa 0.5 MPa 40 40 0.5 MPa 0.4 MPa 30 30 0.4

NCM

NCDME075-0400-M9B-XC4 30 Series NCM Stainless Steel Rod -XC6 Option Specifications 075 (3/4") 088 (7/8") 106 (1-1/16") 125 (1-1/4") 150 (1-1/2") 200 (2") Bore size (inch) Fluid Max. operating pressure Min. operating pressure Ambient and fluid temp.

Air Cylinder Series MB

60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) 85 + 30 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces) 2 (Same surface) 60 90 65 95 75 100 80 105 85 110 90 125 D-A3 D-G39 D-K39 65 + 30 (n 2) (n = 2, 4, 6, 8) 75 + 30 (n 2) (n = 2, 4, 6, 8) 80 + 30 (n 2) (n = 2, 4, 6, 8) 85 + 30 (n 2) (