Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 50mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Specification: Clean Series, Vacuum Suction, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 50mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

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Round type) 1 2 JA T-bracket 32 50 T-bracket 32 50 MXH Mounting nut and rod end nut are included in the basic weight.

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

Free Mount Cylinder

Cylinder Pad (ZP02 to 50) Rod dia. (mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size (mm) Pad (ZPT02 to 50-B4 to 10) Cylinder 4 6 8 10 13 16 20 25 32 40 50 Rod dia. (mm) Model Thread dia.

ISO Cylinder

20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5

Table of Contents

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Smooth Cylinder/Low Speed Cylinder

55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

Made to Order

MGGB20 to 50--XC6A MGGB20 to 50--XC6B MGGB20 to 50--XC6C MGGF20 to 50--XC6A MGGF20 to 50--XC6B MGGF20 to 50--XC6C Small flange Front mounting flange Small flange AA AA AA AL (mm) (mm) (mm) AA Bore size (mm) 20 25 32 40 50 AA Bore size (mm) 20 25 32 40 50 AL Bore size (mm) 20 25 32 40 50 AA 12 12 12 9 16 16 16 9 16 16 16 9 19 19 19 12 25 25 25 12 1768 C Made to Order Common Specifications:

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(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50