Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

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x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

B Model MHR2-30 MDHR2-30 B 25 25.5 7 7 10 10 12-5-17 18 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Size: 10, 15 How to Order Connecting port Body side R MHR 3 10 R Without auto switch R: Body side Port With auto switch (Built-in magnet) MDHR 3 10 R M9N S Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

Compact Hydraulic Cylinder

8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K MM NA NB NN P S T V W ZZ IA 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 5 M8 x 1.25 17 15 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 23f8

Table of Contents

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

ISO Cylinder

5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-M9l D-A9l*2 10

NCQ2/CQ2

499 710 IN OUT 50 412 742 1072 When spring is set in cylinder When spring is compressed with air Weight (g) Action Bore size (mm) Cylinder stroke (mm) (N) Single Acting, Spring Extend 5 10 15 20 Bore size (mm) Stroke (mm) Spring reaction force (N) Second First 12 16 20 25 32 40 50 12 16 20 25 32 40 50 29 35 42 51 5 10 5 10 5 10 5 10 5 10 5 10 10 20 11 9.7 20 20 27 27 29 29 29 29 29 29

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

6.5 7.0 7.5 8.0 Parallel gripper 6.5 7.0 7.5 8.5 30 to 10 30 to 10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Note) The operating range for grippers is measured when both ends are open.

NCG/CG1

Auto switch model Bore size (mm) Operating Range 100 20 25 32 40 50 63 80 D-C7/C80 D-C73C/C80C D-B5/B64 11 10 10 9 10 8 11 17 10 14 10 14 9 14 10 13 8 13 11 16 11 18 D-B59W D-M9, M9W D-M9A 6.5 6 5 4.5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

Air Cylinder Series CM2

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Cylinder

(mm) 12 16 20 25 5 to 30 32.2 25.2 6 6 25 M3 x 0.5 32 5 3.5 15.5 3.5 6.5 depth 3.5 10 5 to 30 33 26 8 8 29 M4 x 0.7 38 6 3.5 20 3.5 6.5 depth 3.5 10 10 5 to 50 35 26 7 10 36 M5 x 0.8 47 8 4.5 25.5 5.5 9 depth 7 9.5 10 5 to 50 39 29 12 12 40 M6 x 1.0 52 10 5 28 5.5 9 depth 7 11 10 Note 2) The external dimensions with rubber bumper are same as those of the standard, as shown above.

Free Mount Cylinder Series CU

Nil S n 21 22 Relief type Vacuum suction type Type of auto switch D-A93 D-M9N, D-M9B Reed switch Solid state switch Action D Double acting Model Cushion Action Standard stroke (mm) Auto switch mounting Cushion Bore size (mm) 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15,

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0.4 MPa External grip 0.4 MPa 0.3 MPa MHK 0.3 MPa 10 10 F 0.2 MPa 0.2 MPa MHS MHC 0 0 10 10 20 20 30 30 40 40 Gripping point L (mm) Gripping point L (mm) F F MHT MHS4-25D MHS4-25D MHY 50 50 Pressure 0.6 MPa Pressure 0.6 MPa MHW 40 40 F Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa -X 30 30 Internal grip 0.4 MPa 0.4 MPa 20 20 MRHQ 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 MA D0 0 10 10