CQS

With auto switch A 45.5 46.5 56 62.5 Bore size (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 CZ CX CW CU CT L1 RR CB CD L B 22 22 24.5 27.5 CL 39.5 40.5 47 52.5 A 50.5 51.5 66 72.5 B 27 27 34.5 37.5 CL 44.5 45.5 57 62.5 Cap bolt 10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 6 6 9 10 12 14 20 24 5 5 8 10 3.5 3.5 4.5 5 14 CD hole H10 Rod d9 15.5 18.5 22.5 Double

Air Cylinder Series CA2

5 o !1 !

MB

Low Speed Cylinder -XB13 (5 to 50 mm/s) 3 Operates smoothly without sticking or slipping even at low speeds of 5 to 50 mm/s. Note 1) Do not lubricate this cylinder. H F ZZ + Stroke Standard model no.

Cylinder with Lock

CB CD d1 d2 E2 FL L l1 l2 MR R1 TG1 UB l2 32 D5032 26 10 30 6.6 48 22 12 5 5.5 9.5 6.5 32.5 45 40 D5040 28 12 35 6.6 56 25 15 5 5.5 12 6.5 38 52 50 D5050 32 12 40 9 64 27 15 5 6.5 12 8.5 46.5 60 63 D5063 40 16 45 9 75 32 20 5 6.5 16 8.5 56.5 70 80 D5080 50 16 45 11 95 36 20 5 10 16 11 72 90 100 D5100 60 20 55 11 115 41 25 5 10 20 12 89 110 MWB-UT CP96N C96N Lock Unit Accessories Auto Switch

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove

CL

(mm) l 40/50/63 80 100 40 50 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50/63 80 100 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 10 12 16 18 20 25 46 55.5 71 76.5 83 88 21 26 31 39 38 47.5 61 66.5 73 78 25.4 31.2 37.0 47.3 22 27 32 41 4 4 5 5 5 5 8 11 13 16 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 MIGAKIMARU10 MIGAKIMARU12 MIGAKIMARU16 MIGAKIMARU18 MIGAKIMARU20 MIGAKIMARU24

Rotary Actuator

Without air cushion With air cushion Angle adjustable type 50 P694020-49 P694020-50 P694020-51 63 P694030-49 P694030-50 P694030-51 80 P694040-49 P694040-50 P694040-51 100 P694050-49 P694050-50 P694050-51 Du, o, !0, !4, @5, @6, #3, $6 are included as a set. u, o, !0, !4, @5, @6, #3, #6 are included as a set. u, o, !0, !4, @5, @6, #3 are included as a set.

Modular Design with Uniform Body Style

[AF] 0.1 MPa Set pressure range [AR] 0.05 to 0.85 MPa Nominal filtration rating*3 [AF] 5 m Compressed air purity class*4 ISO 8573-1:2010 [ 6 : 4 : ]*5 Drain capacity [AF] 8 cm3 25 cm3 45 cm3 Port size 1/4: 30 L/min (ANR) Port size 3/8: 40 L/min (ANR) Port size 1/2: 50 L/min (ANR) Port size 1/4: 30 L/min (ANR) Port size 3/8: 40 L/min (ANR) Min. dripping flow rate*6 [AL] 15 L/min (ANR) 50

Integrated Controller

10 15 20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg]

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

C85

3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23 6.6 23 54 40 8 5 Rod trunnion, Head trunnion Clevis Bore

C85

3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23 6.6 23 54 40 8 5 Rod trunnion, Head trunnion Clevis Bore

Metal Seal/Rubber Seal Series VQ Body Ported

type (Manual) Type of actuation 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

Refrigerated Air Dryers Series IDF/IDU

(C) Correction factor 1.21 5 to 45 50 55 60 65 70 75 80 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 HAA HAW 1 1.25 1.00 1.07 1.10 0.82 1 0.83 1 1 AT 0.68 0.8 0.70 0.95 0.87 0.57 0.6 0.60 0.9 0.76 IDF IDU 0.86 0.74 0.82 0.72 IDFA 0.79 0.70 Data B: Ambient Temperature IDFB Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E ID IDU55E, 75E IDF120D

Table of Contents

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

However, setting "0" will be 50%. 0 0 to 100 [%] PA26 *AOP Function selection A-5 Refer to Name and function column.

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)