Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Indicator light Applicable load Type Electrical entry Wiring (Output) Electrical entry direction Special function 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line A90 A90V No 100 V or less 5 V, 12 V IC circuit Relay PLC 2-wire Reed switch Reed switch Solid state switch Solid state switch 24 V A93 A93V 100 V Grommet 12 V Yes 3-wire (NPN equiv.) 3-wire (NPN) A96 A96V 5 V IC circuit M9N M9NV

Compact Rotary Actuator

18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42 67.5 46 71.5 41 9 360 55.5 106 59.5 110 90 43 59 47 63 30 43 3 180 51 82 55 86 32 7 360 62 125.5 66 129.5 90 50 69 54 73 40 36 4 180 59.5 97.5 63.5 101.5 24 5 360 72.5 152 76.5 156 Operation angle The value in which the auto switch operating

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm

Magnetically Coupled Rodless Cylinder

If they align as shown in Fig. (3), insert the piston slider after turning it around 180. If the direction is not correct, it will be impossible to obtain the specified holding force. Figure 2. Correct positioning Figure 3. Positioning in incorrect direction 3. Do not disassemble the magnetic components (piston slider and external slider).

MTS

140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang

Low-Speed Rotary Actuator

42 67.5 46 71.5 30 90 43 59 32 7 47 63 43 3 180 51 82 55 86 40 90 50 69 24 5 54 73 36 4 180 59.5 97.5 63.5 101.5 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

10

400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180

Basic type / Direct mount type Series CY3B/CY3R

If they align as shown in Figure 4, insert the piston slider after turning it around 180. If the direction is not correct, it will be impossible to obtain the specified holding force. Caution 1. When reattaching the head covers after disassembly, confirm that they are tightened securely.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

180 Angular Type Air Gripper Rack & Pinion Type MHW2 Series 20, 25, 32, 40, 50 How to Order M9BW 20 MHW2 D 1 Made to Order Refer to page 712 for details. 2 fingers Number of fingers 2 Number of auto switches Bore size 20 25 32 40 50 Nil 2 pcs. 20 mm 25 mm 32 mm 40 mm 50 mm S 1 pc. n n pc.

Rotary Table

With external Shock absorber 90 specification 670 1340 1690 2720 type 180 specification 640 1290 1620 2600 Note) Values above do not include auto switch mass.

MHC2

Fluid Air 0.1 to 0.6 MPa 0.25 to 0.6 MPa Operating pressure Double acting Single acting 10 to 60C Ambient and fluid temperature 0.01 mm Repeatability 180 c.p.m. Max. operating frequency Built-in variable throttle Lubrication Not required Action Double acting, Single acting A solid state auto switch with an indicator light can be mounted.

MHC2

Fluid Air 0.1 to 0.6 MPa 0.25 to 0.6 MPa Operating pressure Double acting Single acting 10 to 60C Ambient and fluid temperature 0.01 mm Repeatability 180 c.p.m.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Air Cylinder

FT N N FZ FX S + Stroke M H ZZ + L + Stroke ZZ + Stroke (mm) Bore size Stroke range K KA (mm) A AL B B1 C D E FB FD FT FV FX FY FZ G H1 J (mm) 40 50 63 80 14 18 18 22 26 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 71 81 9 9 12 12 15 18 18 60 70 86 80 90 42 50 59 76 92 100 110 130 160 180

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Compact Cylinder with Lock Series CLQ

Load voltage Auto switch model Perpendicular Lead wire length (m) 0.5 (Nil) Indicator light Wiring (Output) Applicable load Pre-wired connector 1 (M) Type Special function Electrical entry In-line 3 (L) 5 (Z) None (N) AC DC 32 to 100 20, 25 40 to 100 20, 25 32 M9N M9P M9B M9NV M9PV M9BV 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12V 5 V, 12 V 12 V 5 V, 12 V 12 V Solid

Cylinder with Lock

100 85 15 50 16 12 12 10 51 8 Up to 1000 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56 20 13 15 12 58 11 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 65 20 18 12 15 58 11 Up to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 79.5 20 23 18 17 71 13 Up to 1000 40 37 116 41 133 160 1/4 1/4 92 30 52 13.5 18 116 150 92 180

48

, 90 Rotation angle() 310, 180, 90 Size Size 10 30 50 10 30 50 25, 50, 75 25, 50 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-92 Gripper Step Motor (Servo/24 VDC) With dust cover Z type (2 fingers) Series LEHZJ F type (2 fingers) Series LEHF S type (3 fingers) Series LEHZ Series LEHS Opening/closing stroke Opening/closing stroke 4 6 10 14 22 30 Opening/closing stroke 4 6 8 12 Opening

58

Stroke CB (mm) Single clevis Double clevis Bore size (mm) Stroke range (mm) B C CB A AL CDH10 CT CX D E V F W G J CX CZ 125 140 160 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 50 47 143 115 145 17 32 71 15 43 17 15 25 32 32 64 M14 x 1.5 Up to 1000 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 50 47 157 128 160 17 32 71 15 43 17 15 28 36 36 72 M14 x 1.5 Up to 1000 +0.100 0 0.1 0.3 +0.3 +0.1 0 0.2 56 53 177 144 180