ZP

ZP80H ZPA-X201-B P. 76 ZP100HB ZP125HB ZP100H ZP125H ZPA-X301-B P. 76 Buffer Assembly Part No.

42

2 (A) 4 (B) 2 VQ4101 VQ4100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4200 VQ4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4300 VQ4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4400 VQ4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4500 VQ4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component

SYJ300/500/700

Direction Side M5 x 0.8 1 /8 M5 x 0.8 1/8 P, R port M5 x 0.8 C4 (One-touch fitting 4) Port size M3 x 0.5 A port M3 x 0.5 M5 x 0.8 X port Note) M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3

CNA

CNA63 or more 0.3MPa Graph x m 0.4MPa Graph c F 0.5MPa Graph v Load along rod retracted or extended direction m 0.3MPa Graph b F 0.4MPa Graph n m 0.5MPa Graph m F 3.3-6 How to Select Series CNA Selection Graphs Graph b Graph x 0.3MPa P < 0.4MPa 0.3MPa P < 0.4MPa 1000 1000 500 400 300 500 400 300 100 100 100 80 80 80 200 200 100 100 100 63 63 63 CL 80 80 80 50 50 50 40 40 40

Table of Contents

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

Electric Actuator/Slider Type

100 25 LECSA -S1 S3 200 32 LECSA -S3 S4 400 40 LECSA2-S4 Motor option Stroke [mm] 100 25 LECSB -S5 LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

1

32 272 178 36 Stroke B Stroke A S + Stroke (A + B) ZZ + Stroke (A + B) 40 280 178 38 50 314 198 41 63 314 198 43 80 386 242 52 ZZ S Q L GC Bore size (mm) 100 386 242 52 40 282 180 66 12 42 GC 50 310 194 74 14 48 Stroke B Stroke A Series MB1 63 326 210 76 14 48 S + Stroke (A + B) 80 390 248 90 16 58 ZZ + Stroke (A + B) 100 414 270 98 18 60 Stroke B Stroke A ZZ + Stroke (A + B) S + Stroke

CG1

Front/Rear trunnion types are not available for bore sizes 80 and 100. Be sure to read before handling. Refer to p.0-39 to 0-43 for Safety Instruction and common precautions. Refer to p.1.7-6 for precautions on series CG1.

LEC-OM071xx

0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

AC Servo Motor Driver (CC-Link Type ）

A L 3 7 # 0 0 P B 1 0 P B 1 1 P B 1 2 P B 1 6 S p d 0 0 1 Point table error details For the point table No.1 speed data error Point table No. with error Error item Spd: speed Acc: acceleration time constant Dec: deceleration time constant 15 113 16. SERVO MOTOR 16.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(B) 2 (A) 4 (B) 2 (B) 2 (A) 4 (A) 4 Symbols 100 Effective area (Cv factor) % 5 3 (EB) (EA) 5 3 (EB) (EA) 5 3 (EA) (EB) 75 1 (P) 1 (P) 1 (P) 50 P port regulated A port regulated (P port controlled A port regulated) B port regulated (P port controlled B port regulated) 0.1 0.15 0.2 0.25 Set pressure MPa How to Order Interface Regulators P 2 ARBY5000 00 ARBY3000 05 P 2 ARBY7000 Regulated port

JXCx-OMU0026

cable Orange 9 B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A-3

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

LEC-OM069xx

0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65