45

A: Orange B: Green 17.5 16 14 12.5 17 15 (Rail mounting hole pitch 12.5) Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

0.4

q w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

Base Mounted Metal Seal/Rubber Seal Series VQ

Note q w e Material Material No.

Fieldbus System

1(P), 3/5(E) port] Applicable tube O.D.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

7 e u @2 !5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.

Air Cylinder

E C B H1 H1 B1 AL AL C A A K K B F N F N H + Stroke S + Stroke H ZZ + 2 x Stroke d e 10.2 L f h + L ZZ + L + Stroke d d e e 10.2 10.2 f f L L + Stroke h + L + Stroke h + L S + Stroke ZZ + 2L + 2 x Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E F G H1 J K KA M MM (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB Data MC KA MA C NA K NB S + Stroke H B ZZ + Stroke The allowable angle difference of E to B should be limited to 1.5.

0.4

Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.

240

3 e u !

VQC

Refer to e.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

Metal Seal/Rubber Seal Series VQ Body Ported

Description Zinc die-casted Zinc die-casted Body Body w w Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve e e Resin Resin Piston Piston r Pilot valve assembly r Pilot valve assembly Note) L M G 2 Note) L M G 2 VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 Single Single VQ110L L M 2 VQ110L L M 2 Double (Latching) Double (Latching) Voltage 1 to 6 Voltage 1 to 6 Note) L M G

C95Series

Bore si~e ~ Standard stroke (mm) .

5 Port Solenoid Valve, Series VQC

Refer to e.

DOC1023126

Setup communication cable JX-CT-E *A set of the setup communication cable and USB cable. PC To e-Actuator (SingleLEC-W2-U) USB cable Communication Cable for Setting SingleJX-CTC-E Setup software (e-Actuator setup tool) e-Actuator setup tool USB driver Please download from SMC website. https://www.smcworld.com/ .