e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

V

TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

Step Motor Controller

the mode SW (Close the cover after changing SW) u i e Cover o !

Electric Actuator

or less Max. speed [mm/s] 200 or less 400 t, y Graph (sliding bearing type) q, w u, i Graph (ball bushing bearing type) e, r o, !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

JXCx-OMT0023

repeat command end Program end 1000[r/min] 20[ms] 1000[10STMm] 100[ms] 3 [times] 100[10STMm] 100[ms] 2 [times] 200[10STMm] 100[ms] a) b) c) d) e) f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

4/5 Port Solenoid Valve

Port size For sub-plate, manifold type 40, 41, 42, 43 Nil: Without sub-plate R port P, E port 3: Common exhaust type for main and pilot valve D: Push-turn locking slotted type R port P, E port (With gasket and screws) 01: 1/8 With sub-plate Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24,12 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector DIN terminal 24,

Programless controller Step motor (servo 24 VDC)

LEFB16 LEFB25 LEFB32 Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700

NCA1

2 4-NT WF G J TN Depth ND E XT SN + Stroke A ZB + Stroke EA E/2 E DD D Bore size (in) MM KK NT TN WF XT Y LF P SN ZB C BA B AA ND A J G EE R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 2 1/4-28 9/16 3/8 1 1/8 1 1/8 2.02 9/32 3/4 1.1 1.26 3/8 1.43 2.36 200 (2") 5/8 7/16-20 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 1/4 2 1/2 5/16-24 9/16 3/8 1 1/8 1 1/8

NCA1

MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 3.63 2.4 1.84 3/8 2.88

CATALOG VC10

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

AC Servo Motor Driver (CC-Link Type ）

Negative response [E] [e] Command error Command not existing in the specifications was transmitted.

2 Phase Stepper Motor/Without Motor Brake Series LXP

D E Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.