Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

Square Tube Type Air Cylinder Series MB1

to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151

MGG

150, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 63 MGGL Ball bush bearing 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 100 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Valve Single Unit

A: Orange B: Green (Light/Surge voltage suppressor) Manual override G: 300 H: 600 (Press and turn for the locking type.)

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

48

the mode SW (Close the cover after changing SW) u i e Cover o !

Refrigerated Air Dryers

(D) Refrigerant R407C (HFC) IDF E F E G C (101) B 4 x 13 [mm] Dimensions Part no.

Hygienic Design Cylinder Series HY

8 i e !7 !4 t !9 !0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

Guide Cylinder Series MGG

350, 400, 450, 500, 600, 700, 800, 900, 1000 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Digital Flow Switches

L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

ITV

Description Applicable model ITV10 P398010-600 Flat bracket assembly (including mounting screws) ITV30 ITV20, 30 P398020-600 ITV10 P398010-601 L-bracket assembly (including mounting screws) ITV20, 30 P398020-601 [Cable connector] 243 Part No.

CV/MVGQ

C J G5-S CV MVGQ Connection port A CC RB S + Stroke LS + Stroke ZZ + Stroke ZZ + l + Stroke h + l J Stroke range DBore size (mm) A AL B B1 C D E F H1 K LT J LD LH LS LX MM LZ (mm) 40 50 63 80 100 Up to 500 501 to 800 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 16 20 20 25 30 32 40 40 52 52 10

Metal Seal/Rubber Seal Series VQ Body Ported

Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Double solenoid part no. Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Lead wire length Single/3 position part no. AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position part no.

Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)