Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 6 8 24 18 1.8 20Data 2.7 M8 x 1 12 4 12 10.5 34 26 2.2 9 22.5 10 2.7 M8 x 1 12 4 9 26 15 11 40 36 2.8 14 M12 x 1.25 17 6 12.4 33 20 13 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

18.6 1.4 2.2 M4 x 0.7 -X 2.8 M5 x 0.8 2.5 6 8 7 14 18 6 8 24 1.8 20Data 2.7 M8 x 1 10.5 12 4 12 34 26 2.2 9 22.5 10 2.7 M8 x 1 11 12 4 9 26 15 40 36 2.8 14 M12 x 1.25 13 17 6 12.4 33 20 49 41 3.4 27 10-11-15 15 Series MIW/MIS Mounting of Auto Switch When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the direction as below figure.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Dual rod cylinder 6, 10, 15, 20, 25, 32 Series CXS 10-/11-/1221-/22How to Order Clean series 10 11 12 CXSM,CXSL CXSM,CXSL CXSL Relief type Vacuum suction type Relief type (with specially treated sliding parts) Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type L M Ball bushing bearing Slide bearing Nil S n 2 pcs. 1 pc. n pcs.

High Vacuum Angle Valve

(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

15 15 1/4 1/8 1/8 1/8 88 64 62 62 143 113 111 107 M32 x 2 720 Cylinder with End Lock CBM2 2122CBM2/ 1011Specific Product Precautions Be sure to read this before handling.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

3 11-/22-MXP 6 5 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u Z L M9B CDRB2 B W 20 180 S With auto switch q r e !1 i o !

e

LC7 LC7 E-MY2 X168 Refer to the standard model no. on page 1126, 1132 M Stroke range: 51 to 599 mm LC8 LC8 Example) E-MY2H25-300TAN-M9B-X168 E-MY2H XB10 Refer to the standard model no. on page 1132 LXF LXF Example) E-MY2H25-599TAN-M9B-XB10 LXP LXP 2 Long Stroke XB11 LXS LXS Available with long strokes exceeding the standard stroke range.

2

Air leakage will occur. 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread port size Wrench tightening angle after tightened by hand [deg] Tightening torque [Nm] 5. Use R external threads with Rc internal threads and NPT external threads with NPT internal threads. 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 Piping Caution 1/2 15 to 30 14 to 15 2.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY R 1 3 Allowable moment Series CY B 1 3 Series Variations Guide type Series Page 1 3 Basic type CY B 8-15-6/8-15-24 1 3 Direct mount type CY R 8-15-16/8-15-32 Slider type (Slide bearing) CY1S 8-15-46 Slider type (Ball bushing bearing) CY1L 8-15-58 High precision guide type (Single axis) CY1H 8-15-68 High precision guide type (Double axes) CY1HT 8-15-68 8-15-1 2 Magnetically coupled

Basic type / Direct mount type Series CY3B/CY3R

of numbers 15 through 19.