AC Servo Motor Driver (Network card type ）

Velocity Mode Objects (Class ID: 64h) . 19-162 19.7.3.11 Profile Torque Mode Objects (Class ID: 64h) . 19-164 19.7.3.12 Profile Position Mode Objects (Class ID: 64h). 19-166 19.7.3.13 Homing Mode Objects (Class ID: 64h) . 19-171 19.7.3.14 Factor Group Objects . 19-175 19.7.3.15 Touch Probe Function Objects (Class ID: 64h) . 19-178 19.7.3.16 Optional application FE Objects (Class ID: 64h) . 19-180

Ionizer

Without bracket With bracket Note) Nil Bracket Alphabetical Index Length Measuring/ Counter High-voltage unit full length Nil Without sensor Autobalance sensor [Body-mounting type] B Emitter material E 180 mm 220 mm 180 220 Note) Four end brackets are bundled with the bracket model.

CA2

8 501 to 800 81 50 up to 600 20 to 600 35 32 70 27 52 20 40 9.0 12 50 110 17 M8 x 1.25 70 90 11 601 to 1000 MB1 63 101 up to 600 20 to 600 35 32 85 27 64 20 40 11.5 15 59 130 17 M10 x 1.25 86 105 11 601 to 1000 80 119 up to 750 20 to 750 40 37 102 32 78 25 52 13.5 18 76 160 21 M12 x 1.75 102 130 13 751 to 1000 CA2 100 133 751 to 1000 up to 750 20 to 750 40 37 116 41 92 30 52 13.5 18 92 180

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 Compact Cylinder Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160, 180, 200 With a short overall length, the space-saving cylinder helps to make various jigs and equipment more compact.

CL

Note) The manual unlocking cam will rotate approximately 180. Do not rotate the wrench flats section excessively. The lock of a fine lock series cylinder can be disengaged manually through the procedure described below. However, make sure to disengage the lock pneumatically before operating the cylinder.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

(Including Bracket, Set Screw) Cylinder series Applicable bore size (mm) 200 40 BMB5 -032 50 BA7 -040 63 BA7 -040 80 BA7 -063 100 BA7 -063 125 BA7-080 140 160 180 32 BMB5 -032 MDB MDBB, MDNB CDA2, CDBA2 CDA2Q CDA2H CDA2Y, CDLA CDNA, CE2 CDL1 CDS1, CDLS CDS2 CDNS BA7 -040 BA7 -040 BA7 -063 BA7 -080 BA7 -080 BS5-200 BS5-180 BS5 -125 BS5 -125 BS5 -160 Note 1) When using type D-M9A(

Electric Slide Tables

LES25/Step Motor 200 180 160 140 120 100 80 60 40 20 0 70 50 30 Lead 8: LES25K Force (N) Lead 16: LES25J Set value of pushing force [%] Step 2 Check the set value of pushing force.

Refrigerated Air Dryers Series IDF/IDU

220 180 558 70 464 190 558 70 88 276 88 1028 190 1332 464 190 472 220 180 220 180 448 83 70 590 8 Series IDF100FS/125FS/150FS Options Refer to How to Order page 2 for optional models.

Rotary Table

26 to 29 49 to 51 27 3 22 to 25 45 to 47 50 4 20 180 34 to 37 66 to 68 21 2 30 to 33 62 to 64 42 4 30 180 39 to 41 70 to 73 24 2 35 to 37 66 to 69 44 4 50 180 46 to 48 88 to 91 19 2 42 to 44 84 to 87 31 3 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

ChemicalThermo-con

to 242 VAC HED005-HW13 1/2" x 3/8" Black 2 180 to 242 VAC HED005-HW19 3/4" x 5/8" Green/Y ellow PE 0.24 (6) 180 ChemicalThermo-con Series HED Dimensions HED007-W2ll Communication connector The RS-232C uses only upper side connector.

Speed Controller with Indicator

Current model Indicator window direction: 0 Indicator window direction: 180 The numerical indication can be checked without looking into the controller.

Mini Rotary Actuator

Mass* CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type CRJB 1-90 54 CRJB 1-100 1 CRJB 1-180 67 CRJB 1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU1-90 70 1 CRJU1-180 81 *Mass of auto switch is not included. Effective torque Table 4.

Table of Contents

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Mechanically Jointed Rodless Cylinder Series MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 m 160 160 150 150 140 140 (2400) (2400) (2400) (2400) (2400) (2400) l 130 130 (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) m l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600

10

With bracket/Special electrical entry direction Special electrical entry direction Symbol Electrical entry direction Standard Electrical entry direction Symbol Electrical entry direction Symbol Single unit Manifold IN OUT Nil 90 90 90 270 IN OUT A 90 270 90 IN OUT A C 90 IN OUT Individual port 180 180 180 180 180 IN OUT B B 180 IN OUT Individual port (mm) U 46 56 56 W 36 46 46 X 11 13 13

Guide Cylinder Series MGG

Allowable end load F (N) MGGL 80Stroke 2 900st (Ball bushing type) Deflection Y (mm) 800st 700st 1 600st 500st 400st 200st 300st st: Stroke (mm) 100st 0 0 20 40 60 80 100 120 140 160 180 200 220 Allowable end load F (N) MGGL 100Stroke 2 1000st (Ball bushing type) 900st Deflection Y (mm) 800st 1 700st 600st 500st 400st st: Stroke (mm) 200st 300st 100st 0 0 20 40 60 80 100 120 140 160 180

energy saving effect

Page 180 Air-cooled 200 V wCaster Adjuster-foot Kit . Page 180 Water-cooled 200 V HEA eElectric Conductivity Control Set . Page 181 Air-cooled 400 V IDH rBypass Piping Set . Page 181 Water-cooled 400 V Cooling Capacity. Page 170 tSnow Protection Hood . Page 182 Pump Capacity . Page 171 yParticle Filter Set . Page 183 Dimensions . Page 172 uWired remote controller .

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

HRX-OM-Q026

Table 3-1 Weight of the product Weight kg Model Standard model Option A Option T HRSH250/300-AApprox. 280 [Standard model] + 24 None HRSH150/200-AApprox. 215 [Standard model] + 18 None HRSH100-AApprox. 180 [Standard model] + 18 None HRSH150/200/250-WApprox. 180 [Standard model] + 18 [Standard model] + 22 HRSH100-WApprox. 150 [Standard model] + 18 [Standard model] + 52 3.1 Transport HRSH Series