Table of Contents

Specifications. 297 297 298 299 299 300 300 301 302 307 307 308 309 309 310 311 316 321 322 324 324 324 326 327 339 339 339 340 340 341 342 352 354 354 355 357 359 359 360 360 361 362 363 363 363 364 365 367 367 367 367 368 374 374 374 378 379 379 379 383 384 384 384 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Vacuum

=a--t ---< universarJoint --l-u Manifold Common Exhaust Vacuum port of body-ported type can be rotated throughout 360 degrees. 64 $ilencen Iyrc (tuilt-in) Body-Pmtedilp Nl $eni Silencer type/B type Note: One touch, porl threads, or a combination ate available for each port. Reler lo 'How To Order" 'Circles indicate on.touch litting lype lube size.

Vacuum

=a--t ---< universarJoint --l-u Manifold Common Exhaust Vacuum port of body-ported type can be rotated throughout 360 degrees. 64 $ilencen Iyrc (tuilt-in) Body-Pmtedilp Nl $en Silencer type/B type Note: One touch, porl threads, or a combination ate available for each port. Reler lo 'How To Order" 'Circles indicate on.touch litting lype lube size.

CNA

20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 42 50 59 76 92 70 80 93 116 133 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to 39.5 51 58 58 71 72 153 168 182 218 246 37.5 44 52.5 59.5 69.5 9 11 12 15 15 8 0 0 0 0 27 27 34 44 43 13 13 16 16 17 255 284 298 360

Compact Proportional Solenoid Valve Series PVQ

20 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC Note 1) Follow the same procedure for selecting PVQ10 series. 2) Flow rate depends on individual differences between valves and piping conditions.

Cylinder with Lock

mm) (mm) ZZ (Single side) ZZ (Both sides) Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e KA MM N P S T V ZZ f h M l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 153 168 182 218 246 37.5 44 52.5 59.5 69.5 9 11 12 15 15 255 284 298 360

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VQZ Non plug-in type: VV5FS3-101Station Port size SQ U side VFS Pilot valve manual override VFR VQ7 Light window Stations Bottom ported: VV5FS3-10Station 1Port size D side Applicable cabtire cable O.D. 8 to 10 (External pilot port) (Pilot EXH port: PE) n: Stations Formula for manifold weight M = 0.309n + 0.532 (kg) 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 9 360

SYJ300/500/700

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Guide Cylinder Series MGG

Series MGG Guide Cylinder MGGM 63Stroke 7.5 7 (Slide bearing type) 6 Deflection Y (mm) 5 1100st 1000st 4 900st 3 800st 700st 2 600st 400st 500st st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360 380 400 Allowable end load F (N) 80MGGM Stroke 8 (Slide bearing type) 7 MGJ 6 Deflection Y (mm) MGP 1200st 5 1100st MGQ 4 1000st MGG 900st

AC Servo Motor Driver

703125 0.01 625/12544 360 . (5.1) Since CMX is not within the setting range in this status, it must be reduced to the lowest term.

Cylinder with Lock Series CLS

1/5 stroke 30 to 1000 133 292 360 1/5 stroke 35 to 1200 141 326 401 11 Series CLS Accessory Dimensions Y Type Double Knuckle Joint Pins and snap rings for double clevis and double knuckle joint are included when shipped.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

CNA

to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to 39.5 51 58 58 71 72 153 168 182 218 246 37.5 9 11 12 15 15 8 0 0 0 0 27 27 34 44 43 13 13 16 16 17 255 284 298 360

WRF100

Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115 50 4 x 14 through 320 330 0.05 (mm) A B C 200 Arm type S200 S240 340 29 240 360 19 Note 1) This product does not include the limit switch.

CNA

to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to 39.5 51 58 58 71 72 153 168 182 218 246 37.5 9 11 12 15 15 8 0 0 0 0 27 27 34 44 43 13 13 16 16 17 255 284 298 360

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 20 10 5 1 20 10 5 (2) Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 90 180 360 629 90 180 360 Home position return/JOG operation Accelerationeration/D eceleration time constants (msec) PE07

SYJ300/500/700

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) n-Rc 1/8 (A port) (Pitch) (A port) Port size Stations n L1 L2 20 340 331 L1 L2 63 54 80 71 97 88 114 105 131 122 148 139 165 156 182 173 199 190 216 207 233 224 250 241 267 258 284 275 301 292 318 309 335 326 352 343 369 360 19 324 315 18 308

VFS

override Light window 2n-Rc , 1 4 3 8 Stations Bottom ported: VV5FS3-10Station 1Port size D side Applicable cabtire cable O.D. 8 to 10 (Pilot EXH port: PE) 2-Rc 1 8 (External pilot port) 2-Rc 1 8 6-Rc 1 2 n: Stations Formula for manifold weight M = 0.309n + 0.532 (kg) Stations Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 9 360

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

for AC Other dimensions are the same as the grommet. 2 52 43 63 54 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 20 340 331 369 360