2–4

115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x

Compact Cylinder with Solenoid Valve/

-100 135 x 135L M8 x 60L 60 15 CVQM405 45 M5 x 45L x 65L 65 20 10 50 x 50L x 70L 70 25 15 55 x 55L x 75L 75 30 20 60 x 60L x 80L 80 35 25 65 14.5 x 65L x 85L 85 40 30 70 x 70L x 90L 90 7.5 45 35 75 x 75L x 95L 95 50 40 80 x 80L x 100L 100 75 45 85 x 85L x 125L 125 -100 50 90 x 90L x 150L 150 75 115 x 115L -100 140 x 140L Plate Non-rotating Accuracy Plate Allowable Rotational Torque Non-rotating

CQS

Mounting bolt Mounting bolt D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60 Model C Model C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 CDQSWB12-5D -10D -15D -20D -25D -30D CDQSWB16-5D -10D -15D -20D -25D -30D CDQSWB20-5D -10D -15D -20D CDQSWB20-25D -30D -35D -40D -45D -50D CDQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l

MXQ

(mm) (1) B A 2 2.5 4 5 5.5 10 Model MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 3 8-5-7 8 Air Slide Table Series MXQ 6, 8, 12, 16, 20, 25 How to Order Number of auto switches MXQ 12 50 M9N S L AS FR Symmetric type 2 pcs. 1 pc. n pcs.

Rotary Table

Port location/Rotation Rotation 180 90 2Standard type, 180 3Standard type, 90 Standard type Connecting port Connecting port Connecting port position 4Symmetric type, 180 5Symmetric type, 90 Symmetric type Connecting port Connecting port Applicable Auto SwitchesRefer to the website catalog for detailed auto switch specification.

Rotary Table

0.2 to 0.2 to 0.2 to Rotation Time Adjustmen t Range 1.5s/90 2.0s/90 2.5s/90 With internal shock absorber 0.2 to 0.7s/90 0.2 to 1.0s/90 With external shock absorber 0.2 to 1.0s/90 Note4) Cylinder bore size 15 18 21 25 28 32 40 Port size M5x0.8 Rc1/8 (G1/8, NPT1/8, NPTF1/8), M5x0.8 Note1) Minimum operating pressure of MSQA10 (High precision type: size 10) is 0.2MPa.

Environment

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction MHR2 q !

Stroke Reading Cylinder and Counter

to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC Power consumption 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

58

(Different surfaces, Same surface), With 1 pc. 100 95 90 10 D-Y69 D-Y7PV D-Y7WV 100 + 30(n 4) 2 95 + 30(n 4) 2 90 + 30(n 4) 2 10 + 30(n 2) 2 (n = 4, 8, 12, 16) With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs.

155

Mass (g) Auto Switch Internal Circuit D-M9N D-M9P D-M9B Auto switch model 0.5 8 8 7 D-M9N 1 14 14 13 Lead wire length (m) DC (+) Brown 3 41 41 38 5 68 68 63 Main circuit of switch OUT Black Dimensions (mm) DC () Blue D-M9l M2.5 x 4 l Slotted set screw D-M9P DC (+) Brown Indicator light 2.6 Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC () Blue VNA D-M9B VNB 3.2 OUT

XLAQ/XLDQ

Valve opening The time from the application of voltage to the actuation solenoid valve until 90% of the valve stroke has been completed is the valve opening response time. Valve opening operation time indicates the time from the start of the stroke until 90% of movement has been completed. Both of these become faster as the operating pressure is increased.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

12 160 52 28 75 50 320.2 0.6 12 15 12 170 60 32 80 63 400.2 0.6 16 20 16 190 70 40 90 80 500.2 0.6 16 20 16 210 90 50 110 100 600.2 0.6 20 25 20 230 110 60 140 XD + Stroke L MR EW Single clevis (C) EB UB CB Double clevis (D) 136 CP96 Series Accessories Dimensions: Mounting Brackets Axial foot (L) [mm] TG Bore size [mm] Part no.

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10,

Compact Hydraulic Cylinder

BQ-1 BQ-2 BQ2-012 Weight (g) 1.5 1.5 5 259 CHQB/CHQWB Series How to Mount and Move the Auto Switch Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), A93(V), A96(V) 20 1.

Compact

BMY3-016 Auto switch model Tightening torque D-M9l(V) D-M9lW(V) 0.10 to 0.15 210 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(LEJS63) 120 Model Selection LEJ Series AC Servo Motor Clean Room Specication SpeedWork Load Graph/Required Conditions for Regeneration Option(Guide) LEJS40/Ball Screw Drive LEJS63/Ball Screw Drive Horizontal Horizontal 0 10 20 30 40 50 60 70 80 90 60 Lead 8: LEJS40B Lead 10: LEJS63B LEF A 50 Area where the regeneration option is required.

SMC

12 22 50 MXS M9N Number of auto switches Copper, fluorine and silicon-free + low particle generation Nil 2 pcs.

Possible to transfer a workpiece at low-speed.

time of 2s per 90.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .