VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Sub-plate, 40, 41, 42 manifold Port size Nil: Without sub-plate D: Push-turn locking slotted type Electrical entry (With gasket and screws) 24, 12 VDC, 6, 5, 3 VDC M8 connector 24, 12 VDC, 01: 1/8 with sub-plate Note) 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 100, 110, 200, 220 VAC DIN terminal Grommet L plug connector M plug connector E: Push-turn locking lever type D: With connector

Vacuum System Peripherals:

SUP/EXH block assembly mounting position U D side D B U side 2 to 10 stations OMRON Corp.: SYSBUS Wire System C SHARP Corp.: Satellite I/O Link System D Matsushita Electric Works, Ltd.: MEWNET-F System E NKE Corp.: Uni-wire System (16 points output) F1 2 to 15 stations Both sides Special specifications M SUP/EXH block assembly specifications When creating the special specifications, complete

Integrated Controller

0.05 0.03 EQFS32 0.05 0.03 EQFS40 0.05 0.03 C side D side Traveling parallelism does not include the mounting surface accuracy.

REA/REB

C D Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7

Table of Contents

C D E F Dimensions Part no.

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

Cylinder with Lock Series CLS

MNB (mm) Bore size Auto switch model Bore size (mm) Auto switch model CNA 125 140 160 180 200 125 140 160 180 200 D-A9/A9V D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 12 12.5 11.5 12 12.5 CNS D-M9/M9V D-MW/M9WV D-M9AL/M9AVL BS5-125 BS5-125 BS5-160 BS5-180 BS5-200 7 6.5 6.5 7 7 CLS D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5BAL D-F59F/F5NTL D-Z7/Z80 14 14.5 13 14 14.5 CLQ D-A3/A44 D-A5/A6 BT-12 BT

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT TF3040C-TX TF3060C-TX [Unit: mm] 3-M6 8-M M4 M4 3-M6 M6 Approx.17 22 22 G 2 F 1 E 2 IN D 1 D 1 D 1 L C 2 K 2 B 5 J A 5 H 5 Model Dimensions [mm] A B C D E F G H J K L M R3.25 length 8 TF3040C-TX 438 412 390 100 175 160 145 200 Approx.190 180 Approx.91.5 (M6) TF3060C-TX 12 35 12.

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

CATALOG VC10

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

IDU/IDF

dryer Applicable dryer Port size Rc E D D C A B Part No.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Sine Rodless Cylinder Series REA/REB

model D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W Bore size 15 25 32 19.5 23.5 78.5 74.5 58.5 62.5 23 27 102 98 46 42 79 83 31.5 35.5 116.5 112.5 54.5 50.5 93.5 87.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

SYJ300/500/700

It is already built-in to the rectifier circuit. 50 60 100 VAC Hz 1 2 200 VAC Hz 50 60 50 60 110 VAC Hz [115 VAC Hz] 3 Electrical entry 50 60 50 60 50 60 DIN terminal D With connector 4 220 VAC Hz [230 VAC Hz] DO Without connector DC specifications of type "D" and "DO" is only available with 12 and 24 V DC. Power saving circuit is not available in the case of "D", "DO" type.

Rotary Clamp Cylinders

0.15 0.1 0 0.052 5.5 54 72 8 62 40 28 M6 x 1.0 35 50 63 0 0.062 6.6 67 89 9 76 50 M8 x 1.25 0.15 0.1 9 80 108 9 92 60 M10 x 1.5 0.15 0.1 With arm Rod end width across flats F + Clamp stroke C + Clamp stroke D A F E B A 2 x G B D G C H (mm) (mm) H G G F F E D D C C B B A A Model MK32-M MK40-M MK50-M MK63-M Model MK32-N MK40-N MK50-N MK63-N M8 x 1.25 6.2 35.5 18 45 36 20 53.5 9 67 14 18 6

AC Servo Motor Driver (CC-Link Type ）

station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

5 Port Solenoid Valve

B [Pressure center] D side U side Function C 4-position dual 3-port (N.C. + N.O.)