Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 25mm, Port Thread: TN (NPT), Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled)

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 25mm, Port Thread: TN (NPT), Stroke: 125mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint)

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushion, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: NPT,

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushion, Specification: Built-in magnet, Port thread type: NPT, Auto

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: NPT,

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 125mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 100mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 25mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 200mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 25mm, Port Thread: NPT, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31 61 220 390 680 1420 Air consumption cm3 Note 3) Port size M5 Rc 1/8 Weight kg 0.29 0.49 1.2 1.9 3.3 5.7 Note 1) Conductance is molecular flow measured

XLA Series

60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLA- ∗ -F7NJ ∗ - ∗ Series

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLDV Series

) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360 660 1350 3000 5150 Air consumption cm3 for 0.5MPa Note 3 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5:1(SUP),3(EXE) port Weight kg

AC Servo Motor Driver (Pulse input type/Positioning type ）

Malfunction RA1 OFF ON MC MC SK Emergency stop switch Driver Servo amplifier Servo motor (Note 6) MCCB CNP1 MC (Note 10) 1-phase 200 V AC to 240 V AC L1 CNP3 (Note 5) U U L2 Motor V V L3 M W NW P3 (Note 1) (Note 9) P4 CNP2 P+ C (Note 2) D (Note 10) Encoder (Note 3) CN2 L11 Encoder cable L21 (Note 7) Main circuit power supply CN1 Forced stop 2 EM2 CN1 24 V DC (Note 11) (Note 4) Servo-on SON

XLF Series

60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW