Table of Contents

Vacuum Equipment Precautions . 349 350 350 352 353 354 359 359 359 360 360 360 361 361 361 362 363 366 369 370 370 371 374 375 377 379 381 383 385 387 389 391 393 395 397 399 401 403 405 405 405 406 407 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Vacuum Equipment

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

unit manifold (VV2Q32) VX VNl VQ Equation L1= (n1) X 37+56 L2=L110 L3=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max. 20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

section 0.23mm2 Applicable cord O.D. 3.5 to 7 : AC 85.5 78 60 M plug connector (M) R 3 1 P 82.5 83.5 94.5 (Lead wire) 300 Cover dia 1.5 Cross section 0.23mm2 Indicator light 61.5 66.5 R 3 1 P : AC Equation L1=19n+11 L2=19n+23 n: Station (Max. 20) Dimensions L n 2 49 61 87.5 98 19 372 384 412.5 423 20 391 403 425 435.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

> 130 (Double) <132> (Lead wire length) 101.5 (Single) <102.5> 1 P R1 R2 5 3 65 <66> 63.5 <68.5> 300 77 Cover diameter 1.5 Cross section 0.23mm2 Indicator light 1 P < >: AC R1 R2 5 3 Equation L1=19n+11 L2=19n+23 n: Station (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 19 372 384 412.5 423 20 391 403 425 435.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Cross section 0.23mm2 Pg.7 R P Applicable cord O.D. 3.5 to 7 3 1 : AC 93.5 86 M plug connector (M) R P 69.5(74.5) 300 (Lead wire) 86(87) 3 1 82.5(83.5) 98.5 Indicator light Cover dia 1.5 Cross section 0.23mm2 : AC Dimensions n: Stations (Max.20) Equation L1=20n+8 L2=20n+26 L n 2 48 66 87.5 98 18 368 386 412.5 423 19 388 406 437.5 448 20 408 426 450 460.5 15 308 326 350 360.5 16 328 346 375

Process Pump

No power supply required Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 5 to 50 5 to 55 Inlet air temperature (C) Note 1) 5 to 55 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) 5 to 50 Standard performance 20 Inlet air flow rate (L/min (ANR)) Note 2) 625 62 125 250 375 Standard performance conditions Outlet air flow rate (L/min (ANR))

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181 (385) PF2M750-m-L2m-mmm : 0 x 000182 (386) PF2M750-m-L3m-mmm : 0 x 000183 (387) PF2M750-m-L4m-mmm : 0 x 000184 (388) Device ID PF2M705-m-Lm-mmm : 0 x 000175 (373) PF2M705-m-L2m-mmm : 0 x 000176 (374) PF2M705-m-L3m-mmm : 0 x 000177 (375

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Construction Wetted Parts Material AK3652 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 3 Diaphragm Valves for General Applications Manually Operated Type Series AK3652 & 4652 Specications Operating Parameters AK3652 AK4652 Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 250 psig (1.7 MPa) Proof pressure 375

VQ20/30

rail mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 759 749 775 785.5 747.8 722 712 737.5 748 710.8 685 675 700 710.5 673.8 648 638 662.5 673 636.8 611 601 625 635.5 599.8 574 564 587.5 598 562.8 537 527 562.5 573 525.8 500 490 525 535.5 488.8 463 453 487.5 498 451.8 426 416 450 460.5 414.8 389 379 412.5 423 377.8 352 342 375

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

275 287.5 300 212.5 225 187.5 200 200 137.5 150 162.5 175 213.7 223.7 233.7 243.7 253.7 263.7 273.7 163.7 173.7 183.7 193.7 203.7 133.7 143.7 153.7 123.7 17.5 12.5 14 15 16 17 12 13.5 14.5 15.5 16.5 13 14.5 15.5 16.5 12 n L 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 L1 L2 L3 L4 410.5 423 423 435.5 448 460.5 310.5 323 335.5 348 360.5 373 373 385.5 398 300 312.5 325 337.5 350 362.5 362.5 375

Diaphragm Valve for Ultra High Purity

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

Note) Maximum operating temperature: Nylon tarpaulin (60C), Neoprene cloth (110C) Refer to page 375 for part numbers and dimensions. (For rod boot, refer to the dimensions.)

Three different finger variations make it possible to freely select attachment mounting surfaces on the fingers., ESCAPEMENT, SGL FINGER, ESCAPEMENT, C62, 375 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, BASE MOUNTED MANIFOLD, 4/5 PORT SOLENOID VALVE, VVD, 375 lb

Stacking type connector kit manifold for VQZ**2* valve, DIN rail mounting for ease of installation, Valves seperate from manifold for ease of maintenance, Maximum 20 stations available as standard, BASE MOUNTED MANIFOLD, 4/5 PORT SOLENOID VALVE, VVD, 375 lb

Air slide table w/built-in guide rail, Bore size *: 6, 8, 12, 16, 20, 25, Standard or symetric styles, Adjuster options: rubber stopper, shock absorber, metal stopper, Auto switch capable, Cyl, Slide Table, GUIDED CYLINDER, D77, 375 lb

Dual channel heat exchanger, REFRIGERATED THERMO-COOLER, 737, 375 lb

THERMO CHILLER, REFRIGERATED THERMO-COOLER, 737, 375 lb

Dual channel heat exchanger, REFRIGERATED THERMO-COOLER, 737, 375 lb

options, and with fixed or selectable MPa or PSI pressure indications, these switches conform to both CE and UL/CSA global accreditations and IP67 enclosure ratings.Digital pressure switch for air w/2-color display, NPN/PNP open collectors (1 or 2 outputs), IP67 enclosure, Standards: CE marking, UL/CSA (UL508) compliance, ATEX DIGITAL PRESSURE SWITCH, PRESSURE SWITCH, ISE50-80, 845, 375