High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

SX

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 18 pins Terminal block

Air Cylinder Series CA2

V 200 V or less 3-wire (NPN equiv.)

Compact 5-Port Solenoid Valve

D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)

Air Cylinder Series CS1

J K With rod boot 125 to 300 Copper and Fluorine-free 125 to 160 Change of rod end shape 125 to 300 Oversized rod cylinder 125 to 200 Heat-resistant cylinder (10 to 150 C) Cold-resistant cylinder 125 to 300 Low-speed cylinder (5 to 50 mm/s) Large-bore air-hydro cylinder 180 to 200 Special port location With heavy duty scraper Note) Heat-resistant cylinder (10 to 110 C) Stainless steel 125

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

M O U N T I N G See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange S T D S T R O K E/H U N D R E D T H S O F A N I N C H B O R E S I Z E 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200 6 (1/4) 10 (3/8) 16 (5/8) T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa / 145 PSI MaxImum Operating

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(S) means 1-phase 200 V AC power input and (T) means 3-phase 200 V AC power input in the table. Note 2. MFG.:Mitsubishi Electric Corporation (c) Power supply This driver can be supplied from star-connected supply with grounded neutral point of overvoltage category III set forth in IEC/EN 60664-1.

Thermo-chiller

Cooling method Nil None C With inverter for compressor M Deionized water (Pure water) piping P With inverter for pump A Air-cooled refrigeration Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) When multiple options are combined, indicate the symbols in alphabetical order.

energy saving effect

HRS 100/150 Applicable model Dimension [mm] A B C HRSH250/300-A--A 916 536 1838 HRSH100/150/200-A--A 830 401 1538 HRSH100/150/200/250-W--A 570 1353 HRSH 090 HRSH HRSH HRSE HRZ HRZD HRW C HECR HEC 118 HEB A B HED HEA Option symbol With Earth Leakage Breaker B IDH HRSH 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit

AC Servo Motor Driver (CC-Link Type ）

[C][0].

REA/REB

200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W (kg) 20 REA25 -X 10 20Data 1 100 200

REA/REB

200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W (kg) 20 REA25 -X 10 20Data 1 100 200

NCG/CG1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, D C 7 3 ( C ) / C 8 0 C , D A 7 3 ( C ) ( H ) / A80C, D-A53/A54, D-Z73, D-90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

Basic type / Direct mount type Series CY3B/CY3R

300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate stroke

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed