Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

NCQ8

to the load is 197" (5 m) or more. e The load voltage is 100 VAC.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

10

A B C 2 3 5 Grommet Size 1 Resin A 24 VDC Size 2 B E N.C. N.O. A B 4 7 Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet With surge voltage suppressor Size 3 C F N.C. N.O.

MG

) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 100 st Over 50 st to 100 st Over 50 st to 100 st Bore size (mm) Bore size (mm) Over 100 st Over 30 st to 100 st Over 30 st to 100 st 50 st or less 50 st or less Over 100 st 30 st or less 30 st or less Over 100 st 12 16 42 46 60.5 64.5 0 0 18.5 18.5 8 10 12 16 43 49 55 65 1 3 13 19 6 8 85 95 43 49 85 95

MGP

200st 100 124 52 64 52 72 128 148 200 220 54 47 92 85 128 121 174 210 75 90 140 166 M12 X 1.75 M14 X 2.0 24 28 28 11 198 236 156 188 180 210 80 100 50, 75, 100, 125, 150, 175, 200 MGPL(Ball Bushing Bearing)/Dimensions A, DB, E MGPM(Slide Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 50st 75st< 50st 75st< 50st 50st 75st< 75st< 80 100 168.5 178.5 47 37.5 25 30 80 100 167 187

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Locking type C (Manual) 3(R) port PE port 3 position exhaust center Rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 4 1 0 1 0 4 5 24 VDC 12 VDC 3 position pressure center Manual override/Non plug-in type 6 9 Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Other 5 Option Electrical entry Grommet L plug connector

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LAT E C x 200 (= D) 20 LZ LC3F2 Note 1) Distance within which the table can move when it returns to origin.

24

8 32 to 63 Over 100 stroke 80, 100 Over 200 stroke 448 Compact Guide Cylinder MGP Series 12 to 25/MGPM, MGPL, MGPA Section EE details (12 to 25, 50 stroke or less) Section XX details T-slot dimensions Z WA WB XA H9 depth 6 b a X (Mounting hole position) XAH9 XB c d e X0.02 (Pin hole position) [mm] f XA Bore size [mm] a b c d e 3 [mm] [mm] 6 12 4.4 7.4 3.7 2 6.2 16 4.4 7.4 3.7 2.5 6.7 20 5.4

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B

JXCx-OMT0023

repeat command end Program end 1000[r/min] 20[ms] 1000[10STMm] 100[ms] 3 [times] 100[10STMm] 100[ms] 2 [times] 200[10STMm] 100[ms] a) b) c) d) e) f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Electric Actuator

D x 100 (= E) 8 Model L 297 339 397 439 497 539 597 639 A B n D E LEFS16;-100 LEFS16;-100B LEFS16;-200 LEFS16;-200B LEFS16;-300 LEFS16;-300B LEFS16;-400 LEFS16;-400B 180 4 106 B Note 1) When mounting the electric actuator using the body mounting reference plane, set the height of the opposite surface or pin to 2 mm or more because of R chamfering.