Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

CG1

Refer to p.1.7-12 and 1.713.1.

ZP

P Applicable tubing O.D.

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 75 15 85 75 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 75 + 40 90 + 40 15 + 40 75 + 40 80 + 40 85 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Air Cylinder Series CS1

D E EA F FA FD FT FX FY FZ G J K KA M S N MM P l ZZ1 H ZZ d e f h 125 140 160 180 200 250 300 1 2 1 2 3 4 3 4 3 4 50 47 36 90 59 43 14 19 14 16 15 31 30 98 35 82 75 40 145 145 115 190 100 230 110 238 133 261 M14 x 1.5 Up to 1400 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 19 20 16 15 31 24 98 35 82 75 40 160 161 128 212 112 255 110 232 133 255 M14 x 1.5 Up to 1400 M30 x 1.5 0.2

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.

0.55

13 0.5 52.5 36.5 75 33 165.9 168.3 R P R R P R 23 23 149.9 152.3 66 36.5 (23.8) 24 76.2 1/4 [1 (P), 5 (R), 3 (R) port] 1.7 Manual override (Pitch) 4 x 5.5 (For mounting) 46.8 (Lead wire length) (Lead wire length) P = 27.5 28 G: Approx. 300 H: Approx. 600 G: Approx. 300 H: Approx. 600 (Station n) (Station 1) (Indicator light) + + + + + 75.5 52.5 30 2.2 (PE port) L-type plug connector (L) 1

MNB

P-76 (M)

Table of Contents

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Modular/F.R.L. Units Series AC

55 55 72.5 77.5 A2 43 57 57 75 80 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model A1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

•

p 5 " N I . ("'"1l, ' " H ZZ 125 17 15 27 MJOx 1.5 30.5 1/2 98 11 0 222 ;'4(1' 1-7 , . . -'1:5 ' 27 " "M30x l .S 30.5 I 112 98 11 0 228 e 75 40 133 1~ stroke 245 75 75 40 133 I!> S1rot<.e 251 160 20 17 34 M36 x 1.5 34.5 I 314 106 120 246 ~ The minimum stroke wnh roo t'

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

Air Cylinder

, 8) (n = 2, 4, 6, 8) 1 10 80 90 75 Different surfaces 20 100 75 80 90 100 100 100 Same surface D-A375 + 35 (n 2) 80 + 35 (n 2) 90 + 35 (n 2) Different surfaces (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) O 100 + 100 (n 2) 100 + 100 (n 2) Same surface (n = 2, 3, 4, 5) (n = 2, 4, 6, 8) 1 10 75 80 90 Different surfaces 20 55 75 80

MXS Series Air Slide Table

75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16 on P. 60 for one with shock absorber as symmetric.

4/5 Port Solenoid Valve

port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

NCG/CG1

st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st Trunnion style is not available for bore sizes 80 and 100.