3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

9 Specifications p. 10 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 3-Screen Display High-Precision Digital Pressure Switch ZSE20A(F)/ISE20A Series How to Order p. 11 Specifications p. 12 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Double clevis style: (D) A clevis pin and 2 cotter pins are included.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 86 107 120 138 148

NCG/CG1

Up to 600 Up to 1000 Up to 600 Up to 1000 Up to 750 Up to 1000 Up to 750 Note) End boss is machined on the flange for E.

CA2

MB1 up to 600 20 to 600 35 32 85 27 64 20 40 11.5 15 59 130 17 M10 x 1.25 101 86 105 11 601 to 1000 up to 750 20 to 750 40 37 102 32 78 25 52 13.5 18 76 160 21 M12 x 1.75 119 102 130 13 751 to 1000 CA2 751 to 1000 up to 750 20 to 750 40 37 116 41 92 30 52 13.5 18 92 180 21 M12 x 1.75 133 116 150 16 CS1 Without rod boot With rod boot P If a hole is provided to accommodate the boot when the

Modular F.R.L. Unit

mist separator regulator Optional specifications Accessory Symbol Combination AWM20 B C D E G P 2 1 6 8 C J R Z W N AWM30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

High Power Cylinder Series RHC

23 32 40 50 to 100 Rc P EA Rc P EA GA NE 8-J GA WH ND H1 MM I D E E Effective thread K FA JC JC FB A NF C H S + Stroke B ZZ + Stroke (mm) H GA 80 FB 16 FA 10 EA 23 D 62 C 20 B 53 A E 0 Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95

MNB

P-76 (M)

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

Cylinder with Lock

MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100

Cylinder with Lock Series CLS

< 0.4 MPa 0.3 MPa P < 0.4 MPa 4000 1000 900 3000 250 800 250 700 2000 600 200 200 CLJ2 500 180 Load mass: m (kg) Load mass: m (kg) 180 1000 160 700 800 900 400 CLM2 140 160 600 125 300 CLG1 500 140 400 CL1 125 300 200 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph 6 Graph 3 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.

Air Cylinder Series CA2

35 32 81 70 27 52 20 40 70 9 12 90 50 110 17 11 M8 x 1.25 20 to 1000 MB1 20 to 1000 M10 x 1.25 Up to 1000 35 32 101 85 27 64 20 40 86 11.5 15 105 59 130 17 11 M12 x 1.75 Up to 1000 40 37 119 102 32 78 25 52 102 13.5 18 130 76 160 21 13 20 to 1000 CA2 M12 x 1.75 Up to 1000 40 37 133 116 41 92 30 52 116 13.5 18 150 92 180 21 16 20 to 1000 CS1 Without rod boot With rod boot P If a hole is provided

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231 EX260 Series p. 233 EX250 Series p. 235 Accessory Between the Sensor/Switch and the Input

Digital Flow Switches

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

Modular F.R.L. Unit

Failure to follow this procedure can cause damage to the knob and the outlet pressure 0.1 0.1 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 2000 Flow rate L/min (ANR) 0 1000 3000 0 Conditions: Inlet pressure 0.7MPa may fluctuate. Outlet pressure 0.2MPa Pull the pressure regulator knob to unlock.

CNS

500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100

CL

601 to 1000 751 to 1000 751 to 1000 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) FV GA GB GC J H1 K KA M M1 P MM N S W H ZZ e f h ZZ l 59 66 66 80 81 133 133 141 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY