Series IDG

IDG3, 3H IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG-EL5 IDG-EL5H IDG-EL10 IDG-EL10H IDG-EL20 IDG-EL20H IDG-EL3 IDG-EL3H 7 Membrane module kit 8 9 IDG-DP01 Dew point indicator kit Option: P IDG-DP01-X001 13 Membrane Air Dryer Series IDG IDG30, 50, IDG30H, 50H IDG30L, 50L Optional specifications With fitting for purge air discharge (Option: P) OUT IN Purge Purge IDG60, 75, 100 IDG60H, 75H,

IDG

100 Nil None (Standard) P With fitting for purge air discharge 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 S With dew point indicator R Flow direction (Right Left) 5 Standard equipment 10 20 30 50 60 75 100 Note) In the case of two or more options, indicate them alphabetically.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25lV6B/Ball Screw Drive LEFS25lV6B/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Refrigerated Air Dryers

P 40 Q 75 64 Drain tube (O.D. 10, Length approx. 2 m) Drain tube for drain pan of condensed water Power cable holder (Electric wire diameter 18 to 23) Signal cable outlet (Can also be connected on the other side.)

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 K S T V KS KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5

CNA

D-K39C 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, Different sides Data n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8,

CNA

, n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different

Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

CG1

Refer to p.1.7-12 and 1.713.1.

ZP

P Applicable tubing O.D.

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 75 15 85 75 90 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A9 75 + 40 90 + 40 15 + 40 75 + 40 80 + 40 85 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Air Cylinder Series CS1

D E EA F FA FD FT FX FY FZ G J K KA M S N MM P l ZZ1 H ZZ d e f h 125 140 160 180 200 250 300 1 2 1 2 3 4 3 4 3 4 50 47 36 90 59 43 14 19 14 16 15 31 30 98 35 82 75 40 145 145 115 190 100 230 110 238 133 261 M14 x 1.5 Up to 1400 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 19 20 16 15 31 24 98 35 82 75 40 160 161 128 212 112 255 110 232 133 255 M14 x 1.5 Up to 1400 M30 x 1.5 0.2

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.

0.55

13 0.5 52.5 36.5 75 33 165.9 168.3 R P R R P R 23 23 149.9 152.3 66 36.5 (23.8) 24 76.2 1/4 [1 (P), 5 (R), 3 (R) port] 1.7 Manual override (Pitch) 4 x 5.5 (For mounting) 46.8 (Lead wire length) (Lead wire length) P = 27.5 28 G: Approx. 300 H: Approx. 600 G: Approx. 300 H: Approx. 600 (Station n) (Station 1) (Indicator light) + + + + + 75.5 52.5 30 2.2 (PE port) L-type plug connector (L) 1

MNB

P-76 (M)

Table of Contents

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Modular/F.R.L. Units Series AC

55 55 72.5 77.5 A2 43 57 57 75 80 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 A3 43 57 57 75 80 A1 41.5 55 55 72.5 77.5 A2 43 57 57 75 80 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model A1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.