High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

MGG

Hs Approx. 14.5 B 24.5 Auto switch D-B5, B6 D-G5, K5 A B 8.5 Approx.

CLQ

With auto switch Bore size (mm) A B A B RLQ 93.5 30.5 40.5 83.5 93.5 10 to 50 75, 100 Rod end nut 40.5 50 43.5 MLU Head Side flange style: CLQG50 ML1C D50 67 -X 4-6.6 89 76 8 9 A + Stroke B + Stroke 35 20Data Head Side Flange Style Stroke range Without auto switch With auto switch Bore size (mm) A A B B Rod end nut 33.5 92.5 30.5 40.5 82.5 92.5 10 to 50 75, 100 40.5 50 Double clevis style

CLQ

auto switch With auto switch Bore size (mm) A B A B 82 23 33 72 82 10 to 50 75, 100 33 32 Rod end nut 38.5 Rear flange type: CLQG32 54.2 48 34 7 32 B + Stroke 8 A + Stroke 4-5.5 65 56 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x

Compact Cylinder with Lock Series CLQ

auto switch With auto switch Bore size (mm) A B A B 82 23 33 72 82 10 to 50 75, 100 33 32 Rod end nut 38.5 Rear flange type: CLQG32 54.2 48 34 7 32 B + Stroke 8 A + Stroke 4-5.5 65 56 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x

V100

Cv b Cv VZ312 VZ322 VZ314 VZ324 N.C. 0.53 0.66 1.2 1.3 0.45 0.45 0.41 0.37 0.14 0.18 0.32 0.33 0.47 0.66 1.1 1.2 0.39 0.45 0.46 0.48 0.12 0.18 0.32 0.34 M5 75 Body ported N.O.

CQS

A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 A + Stroke LS + Stroke CUJ Bore size (mm) L Y X LZ LY LX LT LH LG L1 LD CU 12 16 20 25 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46 34 38 48 52 2 2

Air Slide Table Series MXQ

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 75 100 40 50 150 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 MXQ8 26 2 2 6 10 25 12 12 16 20 36 35 11.5 MXQ12 34.5 34.5 18.5 8.5 8.5 15.5 15.5 28.5 18.5 18.5 25.5 44.5 44.5 25.5 15.5 MXQ16 27.5 45.5 45.5 24.5 14.5 14.5 14.5 20.5 34.5 24.5 24.5

Membrane Air Dryer

rate Nil None (Standard) Symbol Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew point B With bracket (Except IDG1) (oC) 1 3 5 10 20 60 75 100 Note) When symbol B is indicated, a Nil 20 10 25 50 100 200 600 750 1000 bracket assembly with a part number shown in the table left below is included as an accessory.

ZP

Flat Type Model A B C Y q Pad dia.

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

MXS Series Air Slide Table

K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 125 173 223 60 Air Slide Table MXS Series Dimensions MXS 16 With shock absorber (16) MXS16BS, BT, B 19 A 10 37.5 37.5 18 18 55 (mm) Stroke adjustment range Retracting 5 10 20 20 15 20 20 20 A dimension

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

Modular Design with Uniform Body Style

drain guide M N Q R S T U V W Y Z B B B B B B B AW20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 104.9 91.4 87.4 93.9 AW30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157 123.9 122.2 117.8 122.3 137.8 142.3 AW40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75

IIIIIII

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

Mechanical Valves Series NVM, NVFM, NVZNI

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Model Port size B C D A K J H G F E Q T N P K L M B AC10B AC20B AC25B AC30B

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68 31.5 43 21.5 75-01-A18 75-01-A18 143 198.5 154 209.5 ZPT50HBJ25-01-A18 ZPT80HBJ25-01-A18 75.5 131 88.5 144 50-01-A18 50-01-A18 110.5 166 123.5 179 50 52 36 54 24 35.5 16.5 80 83 58 85 37 48.5 27.5 75-01-A18 75

MB1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).