Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

Air Cylinder

D-X Technical Data 315 CG1W Series With Mounting Bracket Axial foot: CG1WLl LH B 15 LT LZ LX 2 LC (Knock pin position) W X Y Z LS + Stroke X M Y W 4 x LD (mm) Bore size Stroke range B LC LD LH LS LT LX LZ M W X Y Z 20 Up to 1500 34 4 6 20 53 3 32 44 3 10 15 7 47 25 Up to 1500 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 32 Up to 1500 45 4 7 25 53 3 44 58 3.5 10 16 8 53 40 Up to 1500 54.5 4 7 30

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Air Cylinder Series CA2

As a guide, adjust P2 to make W + P2A = P0a. (2) Depending on the size of the load, installing a regulator with check valve at position (b) can reduce lurching during descent and operation delay during ascent. As a guide, when W + P0a>P0A, adjust P1 to make W + P1a = P0A.

Rotary Clamp Cylinders

(mm) D-A9V D-M9V D-M9WV D-M9AVL Auto switch model D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL Auto switch model D-A9 D-A9V B A W B A W Hs Hs Bore size Bore size 12 19 17 11.5 4.5 5.5 7.5 0 1.5 (4) 12 16 21 19 12 4 6 8 0 2 (4.5) 16 Note 1) ( ): D-A93 Note 2) Size W is suitable for mounting models D-M9, D-M9W, D-M9AL, and D-A9.

Rotary Gripper Series MRHQ

B Resin !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

2–4

35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch

Mechanically Jointed Rodless Cylinder Series MY1

Parts B (max.)

Rotary Table/Rack & Pinion Style Series MSQ

Positioning pin hole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a e is -c d w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w o 0 u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n g e 5 9 ra With adjust bolt

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

Mini Free Mount Cylinder

However, the operating piston speed is ranged from 50 to 400 mm/s. 11 3.5 2 x M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 3 C + Stroke B + Stroke A + Stroke (mm) Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 4 Series CUJ Construction Double Acting !3 w e q !1 r y o e t !

Cylinder with Turntable Series MGT

Auto switch a c b d Proper Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV Auto switch model D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Proper Mounting Position (mm) A B A 15 19.5 24.5 B A 14 18.5 23.5 B Bore size 63 80 100 a b 14 18 17 c 20 24 23 d Auto switch model 15 18 22.5 19 23.5 28.5 11 14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming

CQS

a) b) D-A9V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-M9 D-F9W D-M9V D-F9WV D-F9BAL 7-4-42 43 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod D-M9, D-F9W Auto switch model D-A9 D-A9V D-M9V, D-F9WV Symbol A B W A B W A B A B HS HS Double

Compact Cylinder Series CQS

B W B W A B A Hs Hs B A D-A9V D-M9V/M9WV/M9AVL A B W D-M9AL D-M9/M9W D-A9 MU Bore size (mm) Double Acting, Single Rod; Single Acting, Single Rod, Spring Return/Spring Extend [ ]: Denotes the values of D-A93. ( ): Denotes the values of type T. 1.5 (2.5) 7.5 (8.5) 1.5 [4] (2.5 [5]) 1.5 (2.5) 5.5 (6.5) 3.5 (4.5) 5.5 (6.5) 5.5 (6.5) 3.5 (4.5) 5.5 (6.5) 3.5 (4.5) 19.5 12 0 0 17 2 6 7 21.5 25