Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 800, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Magnet: Built-in, Series: with End Lock, Mounting: Front Flange, Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke: 75mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Rear Locking, Release Type: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Series: with End Lock, Mounting: Front Flange, Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke: 50mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Rear Locking, Release Type: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Series: with End Lock, Mounting: Front Flange, Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke: 250mm, Rod Boot: Nylon Tarpaulin, w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Rear Locking, Release Type: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Electric Actuator/Slider Type

mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 LEF Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 LEJ Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 901 to 1000 580 390 190 900 600 300 1001 to

15

Specifications Model LEJS40 LEJS63 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 LEF Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 LEJ 1800 1200 600 501 to 600 1580 1050 520 601 to 700 1170 780 390 LEL 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110

Integrated Controller

800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

600 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 500 500 0.4 MPa 0.4 MPa 400 400 0.3 MPa 0.3 MPa 300 300 0.2 MPa 0.2 MPa 200 200 0.1 MPa 0.1 MPa 100 100 0 0 20 20 40 40 60 60 80 80 Gripping point L (mm) Gripping point L (mm) MHS3-100D MHS3-100D 1,000 1,000 Pressure 0.6 MPa Pressure 0.6 MPa 800 800 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 600 600 0.3

Magnetically Coupled Rodless Cylinder

D-M9N D-M9B D-M9P Auto switch part no.

Made to Order

50 1000 Mounting Brackets/Part No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1000 Bore size (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 1000 Axial foot Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 25, 50, 75, 100, 125, 150, 175, 200, 250, 300