0.55

Type 41/Common exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series

Modular Design with Uniform Body Style

S N F A F N N M J M J S R R K C B C B V2 V1 Q1 Q1 V1 V2 Q2 Q1 Q1 K IN OUT OUT IN EXH U U EXH P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain E P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain AC40-V-D to AC40-06-V-D A N S N F M J R B C V2 V1 Q2 Q1 Q1 OUT IN 2 x P1 (Port size) U EXH E P2 P3 (Port size) G Clearance for maintenance

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

R External pilot Elbow (Downward) B Valve stations P: Flat ribbon cable connector (26 pins) F: D-sub connector Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Double wiring Note 1) Connector mounting position Double wiring 10 11 10 stations 11 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to 22 solenoids possible) Specified

Modular Type Regulators Series AR

AR4 5 AR6 5 AR8 5 AR9 5 Description Model Pressure gauge with limit indicator Note 1) B24P B25P Bracket G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) Note 1) In the gauge part no. (e.g. G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

mounting adaptor: VV317-02-1-02-A 4 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) VV061 VV100 DIN terminal facing upward 141.6 V100 S070 VQD n x 1/4 4 x 3/8 VQD-V Applicable cable O.D. 6 to 12 VK VT VT L Dimension n: Stations Stations Formula L1 = 46 x n + 89 L2 = 46 x n + 59 2 181 151 3 227 197 4 273 243 5 319 289 6 365 335 7 411 381 8 457 427 9 503 473 10 549

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

5 Port Air Operated Valve

to Order Manifold VV5FA 3 40 02 2 05 Common exhaust F Series Stations 02 Thread type Nil F N T Series VFA3000 VFA5000 P, R Port size 1/4 3/8 2 stations Symbol 3 5 A, B Port size 1/4 1/4 Rc G NPT NPTF 20 20 stations Up to 10 stations for VV5FA5 The A and B ports are made on the bottom.

60

n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

3 Port Air Operated Valve Series SYJA300 1

Model Manifold base model R port model Common Individual Port size Applicable valve model Series VV3PA3-411-02 n VV3PA3-423-02 n VV3PA5-411-03 n VV3PA5-423-03 n VV3PA7-411-04 n VV3PA7-423-04 n Rc Rc Rc Rc Rc Rc 1 4 1 4 3 8 3 8 1 2 1 2 VPA300 VPA344 VPA500 Common Individual VPA544 VPA700 Common Individual VPA744 Option Description Part no.

7.5

C N C N For junction common Lead wire length How to Order Indicate the part no. of the connector assembly for the manifold and solenoid valve.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

A

N C Q 2 / C Q 2 M5 0.8 M6 1 M8 1.25 Flange Double Clevis** Bore Size (mm) Foot* M10 1.5 (N)CQ-F012 (N)CQ-D012 12 (N)CQ-L012 (N)CQ-F016 (N)CQ-D016 16 (N)CQ-L016 (N)CQ-F020 (N)CQ-D020 20 (N)CQ-L020 (N)CQ-F025 (N)CQ-D025 25 (N)CQ-L025 (N)CQ-F032 (N)CQ-D032 32 (N)CQ-L032 (N)CQ-F040 (N)CQ-D040 40 (N)CQ-L040 (N)CQ-F050 (N)CQ-D050 50 (N)CQ-L050 (N)CQ-F063 (N)CQ-D063 63 (N)CQ-L063 Note) * If Foot

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.