Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

Modular/F.R.L. Units Series AC

B B B B B N.O.: Black B Dimensions B B N.C.: Gray O O S S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) H J H H J H J J P1 P2 A B C E F G J K

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

ZP

9 9 35 35 M18 x 1.5 M18 x 1.5 9 Width across flats 16 Rc 1/8 9 10 Width across flats 16 Rc 1/8 10 Hexagon width across flats 21 J Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01

2/3 Port Valve

B J J T A H Brass, Copper or BC6 H EPR FPM NBR FPM EPR FPM FPM EPR NBR FPM G H J L B Stainless steel Silver(10 to 25A) Not available for 32A to 50A A H D N G, J E P A H A H A H B D, E J N, P N P T H Steam system (Water for boiler) Insulating oil Steam system (Condensate) Brass, Copper or BC6 B X VX Naphtha Note ) The mark in the option symbols is for non-lube style.

Possible to transfer a workpiece at low-speed.

, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

Mechanically Jointed Rodless Cylinder Series MY1

MY1B10G Stroke 10 10 7.3 7.8 2 x M5 x 0.8 (Hexagon socket head plug) 2 x 2 x 3.4 through-hole Bottom side M4 x 0.7 depth 7 4 x M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2 x M3 x 0.5 thread depth 5) 2 x 5 counterbore depth 2 25 24 3.5 1 2 x M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110

5

500 mm/s Symbol Rubber bumper Allowable kinetic energy 10 0.035 J 16 0.090 J Minimum Operating Pressure Unit: MPa Bore size (mm) 10 16 Minimum operating pressure 0.03 Standard Strokes Made to Order (For details, refer to pages 1069 to 1262.)

Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

ZP

M14 x 1 Male thread Connection Buffer type Rotating (J)/Non-rotating (K) For 2 to 8 6, 10, 15, 25 mm For 10 to 32 10, 20, 30, 40, 50 mm For 40, 50 10, 20, 30, 50 mm Buffer stroke Spring Reactive Force Pad Type (N) 0 stroke Stroke end Pad form Flat 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 Flat with ribs Deep Bellows Pad dia.

MXS

41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 NA 2 2 2 2 2 2 4 4 4 KA H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 ZZ 97 97 97 107 122 161 214 268 320 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 M 83 83 83 93 108 147 200 254 306 MXS20-10 MXS20-

Air Slide Table Series MXS

10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 KA 169 223 275 NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 Z 81.5 ZZ 97 97 97 107 122 161 214 268 320 MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 66 Air Slide Table Series MXS With shock absorber (20) MXS20

Electric Slide Tables

0.25 20 to 400 8 6 2 10 to 200 5 Step motor (Servo/24 VDC) Series LECP1 50, 100 4 1 20 to 400 10 9 4 10 to 150 8 50, 100 150 Series LECPA LESH25 6 2 20 to 400 16 Page 25 2 0.5 10 to 200 4 Symmetrical type/ L type LESH8A 50, 75 1 0.25 20 to 400 8 5 2 10 to 200 5 Servo motor (24 VDC) Series LECA6 LESH16A 50, 100 2.5 1 20 to 400 10 6 2.5 10 to 150 8 50, 100 150 R L LESH25 A 4 1.5 20 to 400

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 10 st 10 st 10 st 5 st 5 st 5st 5 st 5 st M4 x 0.7 6 6 9 10 12 5 60.5 27 54.5 13.5 24 50.5 22 44.5 8.5 19 4 7 14 5 10 M4 x 0.7 14 5 53 63 23.5 28.5 47 57 8.5 13.5 20.5 25.5 4 10 15 6.5 12 M6 x 1.0 20 8 61 71 24.5 29.5 52 62 9.5 14.5 23.5 28.5 5 12 18 8 16 M6 x 1.0 24 10 67.5 77.5 27.5 32.5 57.5 67.5 10 15 27.5 32.5 5 14 20 10 20 Double clevis bracket material: Carbon steel For details

7

) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10, 3/8", 12 91 (97) 22.5 30 45 20 6 13.5 41.5 25 33

JXCx-OMU0004

200 1200 10 130 1400 220 1400 11 150 1600 260 1600 12 170 1800 300 1800 13 200 2000 340 2000 14 230 2500 380 2500 15 280 3000 420 3000 59 No.JXC-OMU0004-A 10.6 LEP LEPLEPYLEPS LEP-J LEP-K [mm/s] 20 10 2] 1000 1000 [mm/s [mm/s] 20 10 2] 1000 1000 [mm/s [mm] 1 1 3 LEP6 LEP10L LEP10 J K J K J K 7 14 12 24 12.5 25 8.5 17 16 32 19 37.5 [N] 10 20 20 40 25 50 [mm/s] 20 10 20 10 20 10 *LEP6