A

1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

ASR

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Table of Contents

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

0.55

Type 41/Common exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Fieldbus System

Ported Type 11 Bottom Ported RoHS How to Order Manifold SS5Y S 10 3 NA C6 N 05 U Refer to page 11 for Type 11/Bottom ported dimensions. q r w t e y u i o q Series y P, E port entry t Valve stations 3 5 U D B In the case of the 32-output SI unit SY3000 SY5000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Symbol 02 Stations Note 2 stations w Type Double

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

KQ2

(mm) KQ2F04 to 12 Effective area (2) (mm2) Connection thread Rc (1) Mass (g) D1 D2 L1 L2 M Model Nylon Urethane Applicable tubing KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 130 58 24.4 9 9 R3 SY A 2 4 18 13 SMC SMC 4 Cover diameter 1.6 Cross section 0.34mm2 B SYJ 2-C6, C8, C10, 02 38 23.4 Mounting holes Manual override C6: One-touch fittings for 6 SX C8: One-touch fittings for 8 M5 X 0.8 External pilot port (Only external pilot style(R)) C10: One-touch fittings for 10 VK 02: Rc(PT)1/4 VZ (C6, C8) 17.5 10.5

Series AS-FM/AS-M/ASD-FM

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32UNF) R NPT N Needle Valve/Flow Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa

High Purity Chemical Valve

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.