SY

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

13

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

OMU0023

for start of Step Data No. 20 operation) Instruction to execute the operation of Step Data No. 10 01 10 9100 0001 02 0100 01 10 9100 0001 20 sent. 11 01 02 004B 0001 01 02 01 Acquires the INP signal information.

EXxx-OMO0027

Index Name / Meaning Type Value 90A0:0 Diag.: Module identification USINT 10 90A0:01 Address of the module UINT 10 90A0:09 Module PDO group UINT 0 90A0:0A Module ident DINT 256 or 257 -95No.EX-OMO0027-A Modular Device Profile Table.

5-Port Solenoid Valve

SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

VFR

02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.

SYJ3000/5000/7000

length) 63.6 [65.8] 107.5 [109.7] (Light/Surge voltage suppressor) 54.2 69.6 [76.6] 50.1 [57.1] + 45 34.7 8.5 31.5 21.5 6 6 17 17 43.9 15 1/8 (P, R port) 45.5 32 24 L plug connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (WO): SYJ5140-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [

G15/G27

Model (Standard) Model (Made to Order) Pressure range (1) Indication unit Connection thread Note MPa G46-2-01/02 G46-4-01/02 G46-7-01/02 G46-10-01/02 G46-2-01 to 02M G46-4-01 to 02M G46-7-01 to 02M G46-10-01 to 02M GA46-10-01 to 02 Model Pressure range (1) Indication unit Connection thread Model Note MPa G46-2-01 to 02-C/C1 G46-4-01 to 02-C/C1 G46-7-01 to 02-C/C1 G46-10-01 to 02-C/C1 G46-

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

Table of Contents

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Nl/min = 1904.1) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Nl/min = 549.6) 8 x 1m AS3001F-08 (Nl/min = 549.6) AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN101-01 (Nl/min = 1089.5) AN110-01 (Nl/min = 1904.1) 10 x 1m AS4001F-10 (Nl/min = 873.5) 10 x 1m AS3001F-08 (Nl/min = 549.6) 12 x 1m AS4001F-10 (Nl/min = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN200

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Fieldbus system EtherCAT compatible SI Unit

0=No error 1=Error 50x1:0 Over counter limit error UNSIGNED8 Number of Channels 50x1:01 50x1:10 Channel 0 Channel 15 Enum081C 0=No error 1=Error 50x2:0 2 Open circuit error UNSIGNED8 Number of Channels 50x2:01 2 50x2:10 Channel 0 Channel 15 Enum081C 0=No error 1=Error 50x3:0 Counter value UNSIGNED8 Number of Channels 50x3:01 50x3:10 Channel 0 Channel 15 UNSIGNED32 0 to 0xF 1: x = Unit

KJ

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A M L2 L1 1 8 4 LL04-01 45 10 21.8 50.9 15 3.5 52.7 10 14 10 1 4 1 8 LL04-02 LL06-01 53 47 14 10 54.9 51.9 54.7 54.8 Applicable tubing 1 4 3 8 1 8 6 LL06-02 LL06-03 LL08-01 44 66 63 12 10 14 9 56.8 58.5 57 21.8 55.9 57.9 52.9 16 14 17 12 1 4 3 8 1 4 LL08-02 LL08-03 LL10-02 8 68 77 89 14 12 17 59 60.7 62.7 19 23.3 56.9 58.9 58.9

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

V

1/8 02 1/4 03 3/8 04 1/2 T U B I N G D I A M E T E R Metric (mm) 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 Model Applicable T H D1 D2 D3 L1 L2 L3 A1 A2 M1 M2 Weight g tube O.D Max Min Max Min Max Min ASV310F-01-06S 6 R(PT)1/8 10 16.8 12.8 17.6 71.9 65.9 69.9 63.9 45.8 39.8 27.4 23.4 17 19 22 ASV310F-01-08S 8 R(PT)1/8 10 19.3 15.2 17.6 73.8 67.8 71.8

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5

KP/KPQ/KPG

-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5