Micro Mist Separator Series AFD20/30/40

Note 2) Bowl assembly for AFD30 to AFD40-06 includes a bowl guard (steel band material). 14-2-44 Micro Mist Separator Series AFD20/30/40 Dimensions AFD20 Bracket (Option) L D G F K M J E B H OUT IN C OUT F.R.L.

Mist Separator Series AFM20/30/40

Note 2) Bowl assembly for AFM30 to AFM40-06 includes a bowl guard (steel band material). 14-2-41 Series AFM20/30/40 Dimensions AFM20 Bracket (Option) L G K D F M J E B H OUT IN C Port size OUT o s Drain Min. clearance for maintenance 45 A L AFM30/40/40-06 Bracket (Option) A D G F K M J C B E H OUT IN OUT Port size Drain Min. clearance for maintenance AFM30: 50 AFM40: 75 P AFM20 AFM30, AFM40

2/3 Port Valve for Various

Series VX Solenoid Coil Assembly How to Order VX021 C 001 01 B Rated voltage (1) VX solenoid coil assembly 02 =+4 7> 01 =+4 7> Electrical option Application 03 =+4 7> Nil # 04 =+4 7> S 5 % * ,* -> -/& 05 ( ! 001 # ) # ) #' ) L 5 % ) / *% ' 06 ! 002 003 Z 5 % *%+ * ,* -07 ( =+4 7> 08 (?

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Title not found

X lmproved flow characteristics I Built-in gauges ftlodel (mm) New otd AC1000 I Easier assembly AC10 ac20 AC2000 AC2500 I lmproved ozone resistance 1 4 ac25 1 4 AC30 AC3000 1 4 4940 AC40-06 AC4000 AC4000 06 1 8 1 8 ac50 ACs000 1 8 ACss00 1 8 AC60 AC6000 1 8 I Larger bowl capacities I lmproved lubricator adlustment r 4 * , ' r | r e t & E t I l E \ A I t t l l t l t t L _ J t I \J f Better

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Set the value closest to the frequency you need. 00h _ x _ _ Notch depth selection 0: -40 dB 1: -14 dB 2: -8 dB 3: -4 dB 0h x _ _ _ For manufacturer setting 0h Table 5.4 Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] 00 Disabled 10 562 01 Disabled 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

REGULATOR

K H J H J H J 1/81/4 M28X1 AR20K-B 1/8 40 67.4 26.5 28.5 28.5 2 Note2 28 29.5 37.5 65 37.5 66 1/43/8 M32X1.5 AR25K-B 1/8 53 71.9 28 27.5 27.5 0 28 28.5 37.5 64 37.5 65 1/43/8 M38X1.5 AR30K-B 1/8 53 85.6 30.7 29.4 29.4 3.5 28 30.4 37.5 65.9 37.5 66.9 1/43/81/2 M42X1.5 AR40K-B 1/8 70 91.7 35.8 33.8 33.8 3.5 28 34.8 42.5 71.3 42.5 71.3 3/4 M42X1.5 AR40K-06-B 1/8 75 93.2 35.8 33.8 33.8 3 28 34.8

Modular Type Air Filters Series AF

Note 3) Bowl assembly for the AF30 to AF60 models comes with a bowl guard (steel band material). 332 Air Filter Series AF10 to AF60 Dimensions AF10, AF20 AF50, AF60 T N S M J U Bracket (Option) Bracket (Option) D R B C T M J V Q N S IN OUT D U OUT R C 2 x P (Port size) V Q IN OUT o s Clearance for maintenance OUT Drain G A 2 x P (Port size) AF30 to AF40-06 B D J M U N S T Bracket (Option)

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

90

Release at least one side. 2 For port exhaust, air is exhausted from the one-touch fitting. 3 Pilot pressure exhaust is common with ejector exhaust. 4 Refer to page 22 for dimensions with a bracket mounted. 06 08 07 09 06 07 6 1/4" 9.7 12.3 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 Metric size Inch size ZK2 LA to J K R A B Manual override (Release valve) Manual override (Supply valve)

AC Servo Motor Driver (CC-Link Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

AC Servo Motor Driver (CC-Link Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan

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ASP with PHot Check Valve enes How to Order ASP S;:30F 0,1 ,0615 t .. , I .""~" Pilot ch".J Body size e diameter size '3: 1/8 standard Applicable tube outsid Millimeter size Inch 06 07 01/4" I 06 '~ 1/4 standard 5 3/8 standard 6 1/2 standard 08 08 05/16" .09 I 10 010 ~1 1 * 03/8' L12 " 012 1211/2" ;~ Type I 3 I Untversal Port size . +' ) PH otport 4' ; ~Y!l1bOl Cylir!

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.