Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: w/o Accessory, Option: 1S-1 (1000cm3 Tank w/Switch Lower Limit ON)

Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: B (Bracket), Option: 1S-1 (1000cm3 Tank w/Switch Lower Limit ON)

Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: B (Bracket), Option: 1S-2 (1000cm3 Tank w/Switch Lower Limit OFF)

Applications: 6 (0.05~0.70MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: w/o Accessory, Option: 1S-1 (1000cm3 Tank w/Switch Lower Limit ON)

Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: w/o Accessory, Option: 1S-2 (1000cm3 Tank w/Switch Lower Limit OFF)

Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: N (NPT), Port Size: 04 (1/2), Accessory: B (Bracket), Option: 1S-2 (1000cm3 Tank w/Switch Lower Limit OFF)

Applications: 6 (0.05~0.70MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: B (Bracket), Option: 1S-1 (1000cm3 Tank w/Switch Lower Limit ON)

Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: N (NPT), Port Size: 04 (1/2), Accessory: B (Bracket), Option: 1S-1 (1000cm3 Tank w/Switch Lower Limit ON)

Applications: 6 (0.05~0.70MPa Operating Pressure Range), Thread: None, Port Size: 04 (1/2), Accessory: B (Bracket), Option: 1S-2 (1000cm3 Tank w/Switch Lower Limit OFF)

Applications: 6 (0.05~0.70MPa Operating Pressure Range), Thread: N (NPT), Port Size: 04 (1/2), Accessory: w/o Accessory, Option: 1S-1 (1000cm3 Tank w/Switch Lower Limit ON)

Applications: 6 (0.05~0.70MPa Operating Pressure Range), Thread: N (NPT), Port Size: 04 (1/2), Accessory: w/o Accessory, Option: 1S-2 (1000cm3 Tank w/Switch Lower Limit OFF)

Applications: 3 (0.05~0.20MPa Operating Pressure Range), Thread: F (G), Port Size: 04 (1/2), Accessory: w/o Accessory, Option: 1S-2 (1000cm3 Tank w/Switch Lower Limit OFF)

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: B (Bracket), Tube Size: 06 (Ø6 One-touch Fitting), Option: 1 (0.2MPa Setting)

Built-in One-touch Fitting: F (One-touch Fitting), Thread: R, RC, Accessory: B (Bracket), Tube Size: 06 (Ø6 One-touch Fitting), Option: S (Sealant)

Built-in One-touch Fitting: One-touch Fitting, Thread: R, RC, Accessory: Bracket, Tube Size: Ø6 One-touch Fitting, Option: Sealant

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [R] R, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type

Fieldbus system (CC-Link compliant)

. -35No.EX-OMI0001-I Dimensions EX510-S 01 EX510-S 01A 01B EX510-S EX510-S 02 EX510-S 02A EX510-S 02B EX510-S 02C Refer to the catalogs and Operation Manual of each valve series for dimensions of the manifold valve. -36No.EX-OMI0001-I Output unit Summary of Product Parts No.

Fieldbus system (DeviceNet compliant)

. -33No.EX-OMI0003-H Dimensions EX510-S 01 EX510-S 01A 01B EX510-S EX510-S 02 EX510-S 02A EX510-S 02B EX510-S 02C Refer to the catalogs and Operation Manual of each valve series for dimensions of the manifold valve. -34No.EX-OMI0003-H Output unit Summary of Product Parts No.

Fieldbus system (PROFIBUS DP compliant)

. -41No.EX-OMI0032-G Dimensions EX510-S 01 EX510-S 01A 01B EX510-S EX510-S 02 EX510-S 02A EX510-S 02B EX510-S 02C Refer to the catalogs and Operation Manual of each valve series for dimensions of the manifold valve. -42No.EX-OMI0032-G Output unit Summary of Product Parts No.