Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

1

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

Modular F.R.L. Unit

04 01 02 VHS3002 03 VHS40-06 VHS3002 03 VHS20VHS403-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E500-06 Note 5) E200E400Piping adapter Note 5) 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Y3401 02 Pressure switch with piping adapter IS1000E-20 IS1000E-40 Y4402 03 Y5403 04 Note 5) Y24Cross interface Note 1) in part

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

V100

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

V

1/8 02 1/4 03 3/8 04 1/2 Energized Open Type Only D I M E N S I O N S T Y P E P O R T S I Z E O R I F I C E X E R I E S VX21/22/23 Solenoid Valve Type (Port Size) Orifice Size (Number) 1 2 3 4 5 6 VX21 VX22 VX23 2mm 3mm 4.5mm 6mm 8mm 10mm 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Piping: 4 x 1 m) VFS VS4 VQ7 Speed controller/Silencer AS2301F-01-04/AN110-01 EVS 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Fieldbus system EtherCAT compatible SI Unit

01 40xA:04 Channel 0 Channel 3 (Analogue range) Enum080E 1: x = Unit No.