Vacuum Pad

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

Vacuum Pad

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

KJ

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

Table of Contents

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

13

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing Nut Insert bushing LQ1T21-TT1-R39 2 3-06 LQ1-3N06 LQ1-3B06 Tubing extensions 10 x 8 3-06 LQ1-3N06 LQ1-3B06 LQ1T21-TT2-R41 2 Tubing extensions 10 x 8 3-06 LQ1-3N06 LQ1-3B06 3-06 LQ1-3N06 LQ1-3B06 LQ1T32-TT1-R37 3 3-08 LQ1-3N08 LQ1-3B08 Tubing extensions 10 x 8 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-TT2-R40 3 Tubing extensions 10 x 8 3-08 LQ1-3N08 LQ1-3B08 3-08

Proposals for Energy Saving

2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Speed Controller with Indicator

33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 7.2 9.4 9 17.2 19.8 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10/32-01 AS131FS1

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

VM

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

Table of Contents

) Rc , , 5 to 60C (No freezing) Rc ,1 ,1 1 4 3 8 1 2 3 4 3 8 3 4 Highly resistant to dust and corrosion, operates reliably, and a bowl guard is provided as standard equipment.

Air Fittings & Tubing

Weight (g) D2 L1 L2 L3 P Q1 Q2 A MB MA a b 12 24 25 37 41 17 18.5 18.5 21 85 KM15-04-06-3 10.4 12.8 13 15.5 15.5 19 19 9.9 11.1 11.1 12.8 12.8 78.5 85.5 92.5 98 105 18 19 20 21 22.5 4.5 6 6 7.5 7.5 61.5 67 74 77 6 6 38.2 10.4 16 4 KM15-04-08-3 15.2 KM15-06-08-3 12.8 15.2 KM15-06-10-3 18.5 KM15-08-10-3 15.2 18.5 8 8 8 8 Kl 45.4 12.8 17 6 10 10 10 10 18.5 21 52.6 15.2 8 Ml KM16 Hl Dl MS Tl

Table of Contents

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet 8 N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N 3 6 10 15 20 J JB K 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y 8 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N 10 13 16 Vacuum inlet: One-touch fitting Applicable tubing O.D.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A A R R B B B B B P P Applicable tubing O.D.: 8, 5/16" P , R port One-touch fitting A, B port One-touch fitting Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) U side D side L3 (N7: 7) (C6: 3.2) 27 Terminal screw M3 DIN rail DIN rail holding screw (3) 8 COM 1 2 3 4 5 6 7 8 COM 1 2 3 4 5 6 7 8 15.7 34 87.7 B B B PORT SOL.a PORT SOL.a SOL.b SOL.b A A A 5.5 3 4 5 6 7 8 stations 2 stations