Table of Contents

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet 8 N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N 3 6 10 15 20 J JB K 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y 8 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N 10 13 16 Vacuum inlet: One-touch fitting Applicable tubing O.D.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A A R R B B B B B P P Applicable tubing O.D.: 8, 5/16" P , R port One-touch fitting A, B port One-touch fitting Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) U side D side L3 (N7: 7) (C6: 3.2) 27 Terminal screw M3 DIN rail DIN rail holding screw (3) 8 COM 1 2 3 4 5 6 7 8 COM 1 2 3 4 5 6 7 8 15.7 34 87.7 B B B PORT SOL.a PORT SOL.a SOL.b SOL.b A A A 5.5 3 4 5 6 7 8 stations 2 stations

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

VFS

D 01F VV5FS4 1 06 03 Thread type Stations Series VFS4000 Manifold Port size Nil N Rc NPT NPTF G 02 2 stations Symbol 03 04 A, B P, R1, R2 Plug-in type with D-sub connector T U side 3 8 Rc Rc Rc M Mixed 08 8 stations F 1 2 1 2 Max. 8 stations Connector mounting direction Option Symbol D side For bottom ported, Rc is only available. 3 8 Porting specifications (A, B) Passage D side mounting

Compact and Lightweight

B All Ports: One-touch Fitting Model D1 D2 D3 d1 d2 d3 M1 M2 M3 L1 L21 L3 L4 A B C E F G1 J1 K1 N1 P1 Q1 ZH05DA-06-06-06 10.4 10.4 10.4 6 6 6 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-06-06-06 55 ZH10DA-06-06-08 13.2 8 14.2 61.7 ZH13DA-08-10-10 13.2 15.9 15.9 8 10 10 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-08-10-10 83.6

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

CG5-S

(mm) Model Model a 4 6 8 10 b 6 8 10 12 2a 4 6 8 10 12 16 KGL04-00 KGT04-06 KGL06-00 KGT06-08 KGL08-00 KGT08-10 KGL10-00 KGT10-12 KGL12-00 Different Dia. Union "Y" KGU KGL16-00 Applicable tubing O.D. (mm) 2a Union Tee KGT Model a 4 6 8 10 b 6 8 10 12 Applicable tubing O.D. (mm) KGU04-06 Model KGU06-08 4 6 8 10 12 16 KGU08-10 KGT04-00 KGU10-12 KGT06-00 KGT08-00 b KGT10-00 Different Dia.

Flow Control Equipment

Metric size 23 04 06 08 10 12 Inch size With One-touch fittings 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Use 1/8" tubing. 4.1-9 Series TMH Holder Specifications A holder for securing a speed controller (in-line style) with a One-touch fitting. 20 to 60C Ambient temperature Material Polypropylene White Color Accessory: Round head Phillips screw for mounting

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

reduces flow setting time

23 3.2 ASP 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 ASN M5 x 0.8 10/32UNF 8 9.6 9.4 AQ ASV Inch Size [mm] AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-01 1/8 VCHC 7.2 9.4 9 17.2 19.8 17.5

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

A

3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42 29 7.7 NVHS4500 1/4, 3/8, 1/2 3/8 85 32 12.6 70 64 49 36 10 NVHS5500 3/4, 1 1/2 136 56 32 90 80 65 54 10 I N P U T P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 H A N D L E C O

SY

Valve Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 P, EA, EB port Rc 1/4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) Type 20P P to A/B 15.84 (0.88) A/B to EA/EB 14.94 (0.83) P to A/B 9.18 (0.51) A/B to EA/EB 9.9 (0.55) P to A/B 3.6 (0.2) A/B to EA

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 ASN M5 x 0.8 10/32UNF 8 9.6 9.4 AQ ASV Inch Size [mm] AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 VCHC 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3

Modular Type Filter Regulator Series AW

251 255 B 234 272 275 B 208 246 249 B 209 247 250 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 66 Mist Separator Regulator AWM20/30/40 Series AWM is a component made up of a regulator and a mist separator that are integrated to provide optimum results in applications such as clean-air blow operations.

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

ZP

Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep 2.5 M5 x 0.8 1 8 B C D E G D E G D E G D E G F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y Model A ZPT25D 25 28 20 5 29 8 6 29 8 8 35 12 6.2 35 12 10 b c d e