V100

mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

DXT192-52-1-A (For 2 position single) DXT192-52-2-A (For 2 position double, 3 position) 1: 100 VAC, 3: 110 VAC, 4: DC 1(P) port 12 12 stations G Rc 1/8 NPT 3/5(R) port Rc 1/8 How to Order Flat ribbon cable type 43P VV5Z3 43P 05 C4 Stations 1(P), 3/5(R) port thread type 4(A), 2(B) port size 4(A), 2(B) port 03 3 stations C4 For How to order applicable connector assemblies, refer to page

CQS

5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5.2 6.2 8.2 10.2 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5 to 30 5 to 30 5 to 50 5 to 50 Note) For basic style 12 and 16 with 5 stroke, through-hole is threaded over the entire length.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

CQS

I OB K Q L RA M RB N T C OA E F H B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 M3 X 0.5 M4 X 0.7 M5 X 0.8 M6 X 1.0 M4 X 0.7 M4 X 0.7 M6 X 1.0 M6 X 1.0 32 38 47 52 6.5 6.5 9 9 5.2 6.2 8.2 10.2 12.5 12.5 14 16 3.5 3.5 4.5 5 7 7 10 10 15.5 20 25.5 28 4 4 7 7 3.5 3.5 5.4 5.4 0.5 0.5 1 1 6 8 7 12 25 29 36 40 5 5 5.5 5.5 5 to 30 5 to 30 5 to 50 5 to 50 Note)For the following

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

C85

3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23 6.6 23 54 40 8 5 Rod trunnion, Head trunnion Clevis Bore

MGP

MB (Width across flats) MGPM, MGPL Common dimensions (mm) Bore size (mm) BM (Adjustment bolt) MA MB BM MC MH 12 16 20 25 32 40 50 63 80 100 5 5 6.5 6.5 6.5 9 9 10 15 18 8 10 13 13 19 27 30 36 41 46 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M8 x 1.25 M12 x 1.5 M12 x 1.5 M16 x 1.5 M20 x 1.5 M24 x 1.5 12.5 11.5 16 16 21 30 34 40 46 52 19 19 27 26.5 26.5 33 32.5 37 53.5 57.5 MC MA MH + Adjustment

ISO Standard Hydraulic Cylinder

5 !6 @9 @8 !4 !3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

Air Fittings & Tubing

(inch) Model Style 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 8 5 32 3 16 1 4 5 16 3 8 1 2 10-32UNF NPT NPT NPT NPT 10-32UNF NPT NPT NPT NPT 3 16 5 32 Hex. socket head male connector Triple universal male elbow 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 Different dia. union "Y" KQ2U KQ2S KQ2VT 1 4 5 16 3 8 1 2 Double branch universal male elbow 10-32UNF NPT NPT NPT NPT NPT NPT NPT

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

5 5.5 5.5 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 6.5 6.5 9 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 3.5 3.5 5.4 5.4 5, 10 For the following bore/stroke sizes, through-hole is threaded over the entire length.

CXWM/CXWL

5.

Title not found

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

Air Cylinder CP Series Cylinder Positioner Assembly

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

Air Slide Table

20 MXQ8A-5-15Zm-X2192 25 4 54 28 3 65 40 52.5 32.5 78.5 110 120 230 10 MXQ8A-10-10Zm-X2192 5 30 MXQ8A-5-25Zm-X2192 26 6 52 23 27 4 85 40 63 42 88.5 130 140 270 10 MXQ8A-10-20Zm-X2192 15 MXQ8A-15-15Zm-X2192 5 MXQ8A-5-35Zm-X2192 32 6 40 31 31 4 70 55 52.5 52.5 104.5 130 140 280 10 MXQ8A-10-30Zm-X2192 15 MXQ8A-15-25Zm-X2192 20 MXQ8A-20-20Zm-X2192 5 40 15 8 MXQ8A-5-45Zm-X2192 46 6 59 29 29 4

CRB2/CRBU2/CRB1

LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 CRB1 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Notes) The foot bracket (with bolt, nut, and washer) is not mounted on the actuator

SY

C10 C12 3 4 5 C8 C10 C12 3 4 5 Applicable cable O.D. 3.5~7 73 65.5 28.5 202.5 Max. 10 54.2 Approx. 300 (lead wire length) 52 Approx. 300 [58.5] Pg.7 (lead wire length) 93.9 93 83.8 74.2 70.2 [167.5] 164.9 184.1 204.3 86.7 36.6 61 (5.5) 36.6 36.6 61 (5.5) (5.5) 61 17 18 SY3000/5000/7000/9000 Base Mounted Type Single Valve How to Order 5 L SY 5 2 40 Port size Series Port size Without sub-plate