/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

Compact

The auto switch may be damaged if a screw other than the one supplied is used. 25ALEC Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 Mounting screw M2.5 x 4 L Slotted set screw (flat point) 500 (1000) (3000) (5000) Indicator light 2.6 3.95

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

NCM

Note 3) Lead wire tolerance 61 D-H7BAL(Example) 3 m 1 m Flexible specification 5 m Z Lead wires with connector indication Part No. of Lead Wires with Connectors Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m Model Lead wire length 0.5 m (Applicable for connector type only) 90 mm D-LC05 3 m 150 mm D-LC30 5 m 3 m D-LC50 5 m Contact Protection Boxes: CD-P11, CD-P12

ZISE20B.eng

MPa ISE20B ISE20B: 0.050 MPa/ZSE20B: 5.1 kPa/ ZSE20BF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20B(F) Safety Instructions Bracket A ISE20B Delay time 1.5 ms or less Bracket B psi P ZSE20B(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ZISE20B-L.eng

Units specification Pressure range Default setting ISE20B: 0.050 MPa/ZSE20B: 5.0 kPa/ ZSE20BF: 5.0 kPa Hysteresis ISE20B MPa "Nil" or M ZSE20B(F) kPa Delay time 0.00 sec.

Dual Rod Cylinder Series CXSJ/CXS

0 y i t o w !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l

HRX-OM-Q026

(English 1, Japanese 1), Operation Manual 2 copies (English 1, Japanese 1), Accessories Y strainer (40 mesh) 25A, Barrel nipple 25A, Anchor bracket 2 pcs.

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

VQ5000

How to order applicable valves Stations VQ 5 1 0 0 Y 5 7 B W D side 3 2 4 6 1 5 Note) Stations are counted starting from station 1 on the D side. Body type 4.

3

Qty. 1 2 3 4 PVC pipe Seal Body Sensor PVC pipe (25A) PVC pipe (30A) 1 1 CPVC ZS-40-U25 ZS-40-U30 1 FKM PPS PPS 25A retaining plate (M5 x 80 with two hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor

C95

weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40

5-Port Solenoid Valve

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted y Pilot valve option !

Plug-in/Plug Lead: Single Unit

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

MGF

NO m: Refer to "Operating Conditions (Allowable eccentric load)" on page 12. m < Wo NO mo Wo m Wo mo < Wo YES mo Wo YES m Wo Model selected Allowable rotational torque Non-rotating accuracy T T (Nm) Non-rotating accuracy Bore size (mm) Stroke (mm) Bore size (mm) 40 0.08 100 75 50 30 63 40 0.06 3 4 5 7 100 63 0.05 10 12 16 22 100 13 17 22 30 Note) The value given for the non-rotating

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

240

200 200 LEJ 160 160 L7 [mm] L7 [mm] 120 120 LEL Y L7 80 80 LEM 40 40 Me LEY 0 0.1 0.2 0.3 0.4 0.5 0 0.0 0.3 0.6 0.9 1.2 1.5 0 m Vertical Work load [kg] Work load [kg] LES 200 200 LEPY LEPS LEPY LEPS 160 160 L8 [mm] L8 [mm] 120 120 LER Z 80 80 L8 LEH 40 40 0 0.1 0.2 0.3 0.4 0.5 0 0.0 0.3 0.6 0.9 1.2 1.5 0 Me LEY -X5 m Work load [kg] Work load [kg] 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y