VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

PF-OMN0009_C

1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

Plug-in/Plug Lead: Single Unit

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic uid ll function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled refrigeration

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Note) 200 V type only. 400 V type is provided with an earth leakage breaker as standard.

Air cylinder (Series compatible with secondary batteries)

(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specifications: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual:

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread, Lead Wire: w/o Lead Wire, Bracket: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

155

24 V 100 V, 110 V, 200 V, 220 V 10% of rated voltage* Pilot solenoid valve specification Electrical entry DC AC (50/60 Hz) Coil rated voltage V Allowable voltage fluctuation Power consumption W 0.35 W (With indicator light: 0.58 W) 0.78 (With indicator light: 0.87) 0.86 (With indicator light: 0.97) [0.94 (With indicator light: 1.07)] 1.15 (With indicator light: 1.30) 1.27 (With indicator

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types. 25A-ISE20C is a digital pressure sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the 25A-ISE20, the 25A-ISE20C(H) adds a 2nd switch output, as well as analog voltage or current output. 

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types. 25A-ISE20C is a digital pressure sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the 25A-ISE20, the 25A-ISE20C(H) adds a 2nd switch output, as well as analog voltage or current output. 

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread)

Suitable for the secondary battery manufacturing environment; 3 setting modes: 3-step, simple, function selection; 7 displayable units: MPa, kPa, kgf/cm2, bar, psi, inHg, mmHg; 2 switch output (NPN or PNP), plus 1 analog output (V or mA); Port size: M5 female; Panel mounting adapter available

Suitable for the secondary battery manufacturing environment; 3 setting modes: 3-step, simple, function selection; 5 pressure units: MPa, kPa, kgf/cm2, bar, psi; 2 switch output (NPN or PNP), plus 1 analog output (V or MA); Port size: M5 female; Panel mounting adapter available