) Port size Rigid vinyl chloride tube Note 1) O.D. 26 mm (Nominal dia.: 20A) O.D. 32 mm (Nominal dia.: 25A) Rigid vinyl chloride tube Note 1) O.D. 22 mm (Nominal dia.: 16A) Applicable tube 6 mm One-touch fitting Note 2) Rc1/8, M5 x 0.8, NPT1/8 Pilot port size Note 1) Rigid vinyl chloride tube complies with JIS K6742 Note 2) SMC polyolefin tubing (Series TRH) and soft polyolefin tubing (Series

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads R/NPT W M L E W H A Model E L A M LQ3H11-M LQ3H12-M LQ3H21-M LQ3H22-M LQ3H31-M LQ3H32-M LQ3H33-M LQ3H34-M LQ3H35-M LQ3H36-M LQ3H38-M LQ3H41-M LQ3H42-M LQ3H43-M LQ3H44-M LQ3H51-M LQ3H52-M LQ3H53-M LQ3H61-M LQ3H62-M LQ3H63-M 4 3 10 11 33.5 10 29.5 14 28.5 9 32.5 1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55

2/3 Port Valve for Various

Dimensions Normally Closed: VXP2270/2380/2390 Normally Open: VXP2272/2382/2392 Grommet: G VC VDW VQ VX2 Port size VX VX3 Conduit: C DIN terminal: D VXA VN LVC LVA LVH Cable 6 to 12 LVD LVQ LQ LVN TI/ TIL Conduit terminal: T PA PAX PB Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N M N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed

New

z300 24.4 Q z300 I 1/2 R 1/2 K K S S Exhaust port L L E H H E U U F F G G 2 P 2 P Port size Port size DIN terminal A D Q T J R Cable 6 to 12 S I K 24.4 1/2 Exhaust port (44) U F G1/2 L H E Port size 2 P G Dimensions (mm) Model Port size P A D E F G H I J K L S VXF25A< VXF26A< 2 1/2 3 182 206 92 102 212 247 47 63 117.5 119 141 176 18.6 18.6 78.4 78.4 59.8 59.8 24 24 30 30 Grommet Grommet

HRX-OM-T002

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Lightweight and Compact

Automatic fluid fill port (Rc3/8) Applicable model HRS090-ll-l-J Fluid fill method Built-in solenoid valve for automatic fluid filling Fluid fill pressure [MPa] 0.2 to 0.5 Overflow port (Rc3/4) Feed water temperature [C] 5 to 40 Option symbol M Applicable to Deionized Water Piping HRS090 M Applicable model HRS090-ll-l-M Contact material for circulating fluid Stainless steel (including heat

VXD21/22/23

Electrical option VDW Nil S L Z None With surge voltage suppressor With indicator light With light/surge voltage suppressor Body size 4 5 6 7 8 9 VQ 15A 20A 25A 32A 40A 50A VX2 Refer to the table (2) given below for availability.

Pulse Valve

Port size L M (F) (E) (B) J K (C) Port size: Size 14 A ( 52) (20) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) H Exhaust port 3/8 2 x P Port size (F) L M (G) (E) (B) J K 20 (C) Dimension in ( ) shows the dimension after tightening.

3 Port Solenoid Valve/

Part number Cable length [mm] ZS-37-L 300 ZS-37-M 500 ZS-37-N 1000 ZS-37-P 2000 ZS-37-C 5000 Optional Accessories Precautions Plug in and pull out the connector vertically without tilting to one side.

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

3 Port Solenoid Valve/

M12 Connector Cable (4 Pins) Made by OMRON Part number Cable length [mm] ZS-37-L 300 ZS-37-M 500 ZS-37-N 1000 ZS-37-P 2000 ZS-37-C 5000 Part number Cable length [mm] Changing the entry direction After separating the terminal block and housing, the cord entry can be changed by attaching the housing in the opposite direction 180.

240

side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)

AIR CYLINDER

Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

VXP21/22/23

N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 1 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 48 50 50 95 97 97 62 64 64 125 132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 84

LEY-OM007

3.0 40.5 LEYG25 M L M50.8 3.0 50.5 LEYG32 / [Nm] [mm] M L M50.8 3.0 10 LEYG16 M L M61.0 5.2 12 LEYG25 M L M61.0 5.2 12 LEYG32 / [Nm] [mm] M L M40.7 1.5 7 LEYG16 M L M50.8 3.0 8 LEYG25 M L M61.0 5.2 10 LEYG32 LEY / 0.1mm / 0.05mm LEYG / 0.05mm 7.4. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25

Electromagnetic Digital Flow Switch

Model Flow range 0.5 L/min 2 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 0.5 L/min 20 L/min LFE1 0.4 L/min 24 L/min 0.4 L/min 24 L/min 2.5 L/min 100 L/min LFE2 2 L/min 120 L/min 2 L/min 120 L/min 5 L/min 200 L/min LFE3 4 L/min 240 L/min 4 L/min 240 L/min Rated flow range Display flow range Set flow range 21 These safety instructions are intended to prevent hazardous situations

Coolant Valve

2 3 4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

PF-OMN0009_C

PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm (100 L/min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/