Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

High Purity Fluoropolymer

1 2 2 3 3 3 4 4 5 5 6 6 Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A 25A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(120) 3 position 0.35 0.48 [0.57] [0.41] [1.3] center 3.3 0.78 0.43 Pressure 0.45 0.56 2.1 [0.85] [0.25] [0.54] center 170 (90) Single 2.3 0.61 0.35 0.74 2.9 0.41 2 position 190 (110) Double Closed 1.9 0.50 0.44 0.60 2.2 0.46 center 1/4 Note 1) M5 x 0.8 SYJA740-02 Exhaust 0.27 0.87 3.7 3 position 1.3 200 (120) 0.35 0.45 center [0.56] [0.43] [1.4] 3.6 Pressure 0.84 0.23 0.47 0.58 2.1 [0.83

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4 4 1 7 6 5 24 VDC 12 VDC 240 VAC 50/60 Hz Semi-standard For other rated voltages

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

-S 200 V to 230 V, LECSS2-T 200 V to 240 V), I/O Connector: 1 (1.5m)

PF-OMM0004_C

F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20] =00 = ON EEPROM 100 +100 OFF GND 30 msec. 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] [-] [F20] -47No.PF-OMM0004-D [F22] 5 V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200

Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32

1 Controller mounting * Select the LECP2 when setting the stroke range using the stroke adjustment unit or an external stopper. 11LEJS Nil Without cable (Without communication plug connector)*2 Nil Screw mounting D DIN rail mounting* 1 1.5 m 3 3 m 5 5 m S Straight type communication plug connector*2 25A* DIN rail is not included. Order it separately.

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

thread) Valve sizes 2 to 4: VN-16 2 to 4 2 0 1 A VNC 15A (Except valve size 8, 9) Air operated External pilot solenoid 2 VNC 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc 1 2 4 3 2 1 110 VAC 50/60 Hz 200

DOUBLE CHECK BLOCK, 25A. 160.00000 lb. J55.

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T NBR seals FKM seals EPR seals A B C None With bracket Nil B Note) Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 110 VAC 50/60 Hz 200

Process Valve: 2 Port Valve For Flow Control VNB Series

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Threaded port only Thread type Nil F N T Rc G NPT NPTF 2 to 4 VNB 15A Air operated 2 0 1 A External pilot solenoid 2 VNB 15A 1 1 1 A T CE-compliant Nil Q CE-compliant Valve type Port size Valve size Rated voltage Electrical entry: D or DZ only Symbol Manual override Port size Rc 1 2 3 Note 2) 100 VAC 50/60 Hz 200 VAC 50/60 Hz

DOUBLE CHECK BLOCK, 25A. 200.00000 lb. J55.

Series: 25A-LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: V8 (400W Output, Absolute Encoder), Lead Screw: A (LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm), Stroke: 500mm, Motor Option: B (w/Lock), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: 5 (5m), Driver Type: U2 (LECYU2-V, 200~230V, Absolute

Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: D (Out 1: NPN, Out 2: Analog 4 to 20mA), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber)

Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: A (Out 1: NPN, Out 2: NPN), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only)

Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: A (Out 1: NPN, Out 2: NPN), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: M (SI Unit Only)

, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, SCREWS (25A-SY70M-26-1A) QTY 30, 4/5 PORT SOLENOID VALVE, VVD, 60.00000 lb

Plug-in Unit

stations PDC Flat ribbon cable kit (20P) without cable Note) (16 stations) 2-2-20 Base Mounted Series VQC4000 Plug-in Unit Manifold Option Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 VQC SQ VQ0 ^{VQ4 Residual pressure release valve perfect spacer VVQ4000-25A}