Body Size: 20, Back Flow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Back Flow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Back Flow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Pressure Units: Unit on Product Label: MPa,°C, Pressure gauge in SI units: MPa

Body Size: 20, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Pressure Units: Unit on Product Label: MPa,°C, Pressure gauge in SI units: MPa

This combination Filter/ Regulator minimizes space and piping by integrating the 2 units into one. Standard features include a relieving regulator, which can be quickly locked by pushing down on the adjustment knob. There are many options, which include gauges, auto-drain, metal bowl and covers, different set pressures, etc. The AW is part of the family of modular air preparation

Body Size: 40, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Pressure Units: Unit on Product Label: MPa,°C, Pressure gauge in SI units: MPa

Series: AFM, Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Flow Direction: Left to Right, Pressure Unit: Unit on Product Label: MPa; Temp Unit: °C

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 1/4, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa, Made to Order: -

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Body Size: 20, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 1/8, Mounting: w/Bracket, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 1/8, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 01 (1/8), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 01 (1/8), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Back Flow: w/o Backflow Function, Thread: F (G), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

LEY-OM007

d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

Air cylinder (Series compatible with secondary batteries)

Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 D-M9-900/M9V-900 D-M9W-900/M9WV-900 90-BA7-040 90-BA7-040 90-BA7-063 90-BA7-080 90-BA7-080 Table 5 Operating Range Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 7.5 8.5 9.5 9.5 10.5 D-M9-900/M9V-900 D-M9W-900/M9WV-900 4.5 5 5.5 5 6 Values which include hysteresis are for guideline purposes only, they are