VM

A OUT IN A OUT IN 1 2 B 3 B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ends (A) 16 2 Extension end (CS) 20 3 Stroke adjustment range 0 to 5 mm Retraction end (CT) 25 5 Metal stopper Both ends (C) Proper Auto Switch Mounting Position (Detection at Stroke End) E A B Reed auto switch: D-A93 Stroke B Stroke E Auto switch operating range Model A 100 40 50 150 30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(

LEC-OM02704CN

(ZP)[1][2][8][0]17bit 14 37 14 (5) ON/OFF((DO)) ON/OFF [9][0] (a) DO [8][B][0][0]0004DO 0 0 0 4 4 DO (b) ON/OFF [9][2] [A][0] b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 (c) DO DO[8][B][0][0] [8][B] [0][0] 0 DO 14 38 14 (6) (a) [8][B][0][0]0003 0 0 0 3 3 (b) ([8][B]

Dual Rod Cylinder Series CXSJ/CXS

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

KR

26.5 22 30 33.5 24 20.5 15.5 26 27.5 14 26.1 8 18.0 18.5 17 Applicable tubing 17 41.5 10 29.5 21 3 8 KGH10-03 29 22.5 30 1 2 KGH10-04 27 19 53 42 34 22 1 4 3 8 KGH12-02 KGH12-03 34.5 28.5 19 12 23.5 22 58.3 46.1 30 1 2 3 8 1 2 KGH12-04 KGH16-03 KGH16-04 51 61 47 22 22 39.5 32 35.5 26.5 81 (81) 113 (96) 16 24 24 Connection thread Reference dimensions after R thread installation

AC Servo Motor Driver (CC-Link Type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2 pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1 pc. B 45 13 22 13.

smcmaintenancepartslist

Note 3) Separate spacers are required for modular unit. 227 Regulator with Built-in Pressure Gauge ARG20(K)/30(K)/40(K) Replacement Procedure is P.431 Construction ARG20/30/40 ARG20K/30K/40K B-B A-A B-B y r IN OUT !0 t o o i u B A A P K U C S O H L to The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series ARG. B Replacement Parts Part no.

MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

MGP

A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.

CNA

ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/

CNA

B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

Air Slide Table

0 A B 11.5 4.5 11.5 4.5 6 7 7 1 A B NN x M4 x 0.7 Tapped through hole 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) ZZ 48 58 68 86 96 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 K 21.5 31.5 41.5 51.5 61.5 J 17 27 37 48 65 I 9 9 9 16 9 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 N 4 4 6 6 6 HA 16 26 20 28 28 Model F 22 25 21 26 27 GA 13 13 29 39 49 MXQR6-10 MXQR6-20 MXQR6-30 MXQR6

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

ISO Standard Hydraulic Cylinder

ZZ + Stroke Stroke range Bore size (mm) B CD MM NA NB P PJ RR K L GB CY D C CX MA E F G GA H A J 32 7 25 to 800 45 33.2 32 M6 x 1 M14 x 1.5 56 12 46 23 17 1/4 19 18 12 16 15 30 35 12 18 14 43 40 25 to 800 63 41.7 43 M8 x 1 M16 x 1.5 73 14 51 32 3/8 17 18 9 19 22 20 19 34 37 12 19 47 22 50 25 to 800 75 52.3 60 M12 x 1.25 M20 x 1.5 74 20 57 33 1/2 29 11 32 18 28 30 25 42 9 24 42 53 28 63 25

MG

CX Dimensions Dimensions DM5 x 0.8 Relief port (Vacuum port) -X 20Data FB B + Stroke A + Stroke 5 10 FB B + Stroke A B Bore size (mm) FB A + Stroke 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 51 stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 19 20 22 22 23 23 24 29 Other dimensions are the same as standard type. 66 67.5 71.5 78 83 88 102.5 120 A Over 30

AC Servo Motor Driver (CC-Link Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 13 22 13.

AC

8 (37) 50.5 31 14 22 37 133 9 25 115 121 Bleed port 31 VER4000 VER4001-: With sub-plate With flow control interface With B port regulator 99 16 16 Hex. socket head cap screw M6 X 53 With SW A B (MAX.45) (MAX.45) 37 75 62 R1 EA P EB R2 172 162.5 98 30 30 G(PF)1/2 (Cable: 6.8 to 11.5) (MAX.243.5) (MAX.228.5) Interface regulator Gauge G36-10-01 183.5 198.5 (ARB310-00-B) Flow control interface

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

28.5 32.5 B 22 22 29.5 32.5 B 17 17 19.5 22.5 21.5 21.5 22.5 24.5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 12 16 20 25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20