Thermo-chiller/Rack Mount Type

The weight will increase by 2 kg when Option T1 (Inverter pump mounted) is selected. 12 Option M (Applicable to DI water piping) does not contain copper. 13 For Option DM (With electric conductivity control function, Applicable to DI water piping) 14 If the product is used at an altitude of 1000 m or higher, refer to For altitudes of 1000 m or higher on page 42. 15 No continuous voltage

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

22 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 47 32.5 4 8 40 Up to 1000 24 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 54 38 4 8 50 Up to 1000 32 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 66 46.5 5 63 Up to 1000 32 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 77 56.5 5 80 Up to 1000 40 25 G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5

Cylinder with Lock

32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56 20 13 15 12 58 11 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 65 20 18 12 15 58 11 Up to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 79.5 20 23 18 17 71 13 Up to 1000 40 37 116 41 133 160 1/4 1/4 92 30 52 13.5 18 116 150 92 180 144 21 93.5 22 25 20 19 72 16 With Bellows

HRX-OM-W002

Cooling capacity[W] Cooling capacity[W] 2000 2000 2500 Cooling capacity[W] Cooling capacity[W] Cooling capacity[W] 2500 Cooling capacity[W] [W] 25 25 25 25 [W] 25 25 1500 1500 1500 1500 25 25 2000 25 1500 1500 2000 1500 1500 32 32 32 32 32 32 32 32 32 1500 40 40 40 40 1000 1500 1000 1000 40 1000 40 40 1000 1000 40 1000 1000 40 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

Electric Actuator

80 LEJS40S;;-900;-; 1223.5 1263.5 906 960 12 4 800 180 LEJS40S;;-1000;-; 1323.5 1363.5 1006 1060 14 5 1000 80 LEJS40S;;-1200;-; 1523.5 1563.5 1206 1260 16 6 1200 80 12 Series LEJS Dimensions: Ball Screw Drive LEJS63 Body mounting reference plane 4 x M8 x 1.25 depth 12 (172) +0.030 0 6H9 ( ) depth 7 122 Encoder cable (7) M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 68 124 160 124 47 49.5

Cylinder with Lock

8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces

CNA

60 80 42 100 85 15 52 16 12 12 10 8 M8 X 1.25 to 800 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 X 1.25 to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 M10 X 1.25 to 1000 40 37 102 32 119 139 1/4 1/4 78 25 52 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 M12 X 1.75 to 1000 40 37 116 41 133 160 1/4 1/4 92

Table of Contents

Recommended torque: 12 to 14 Nm.

AC Servo Motor Driver (Pulse input type/Positioning type)

100 1000 500 250 143 1000 500 250 Home position return position data (m) PE08 0 -4000 (<1000 stroke)/-400 (>1000 stroke) Stopper type home position return PE10 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000 (Non)/002 (LEC-MR-RB-032)/003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors

MY1

) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (1000) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 (900) (900) (900) (900) (900) (900) 20 20 1.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 Load point distance (mm) 100 1000 Load point distance (mm) LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load

10

2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 45 50 55 60 70 75 D-A9lV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 50 + 30 (n 4) 2 (n = 4, 8, 12,

AC Servo Motor Driver

1 12.

MY1

) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

C95

2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 6-12-28 29 Series C95N Specific Product Precautions 1 Be sure to read before handing.

CLS

75 133 368 Up to 1000 98 345 345 388.5 452 477 368 368 409.5 470 495 8 9 0.2 stroke 98 345 30 to 1000 75 133 368 98 Up to 1000 0.2 stroke 106 388.5 75 141 409.5 106 30 to 1200 Up to 1200 0.2 stroke 111 448 85 153 466 115 30 to 1200 Up to 1200 0.2 stroke 111 468 90 153 486 120 30 to 1200 Up to 998 0.2 stroke 141 579.5 105 176 595.5 30 to 1200 0.17 stroke 9-9-12 13 Series CLS Cylinder with

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg 16 12 25 15 MY2C40 MY2HT40 Horizontal impact: P = 0.5 MPa 40 24 Horizontal impact: P = 0.5 MPa Stroke Adjusting Unit Holding Bolt Tightening Torque (Nm) 2000 1500 2000 1500 H unit H unit Impact speed mm/s Impact speed mm/s L unit 1000 1000 Bore size (mm) Tightening torque 16 0.6 L unit 500 400 300 500 400 300 25 1.5 Air cushion Air cushion 40 5.0 Calculation

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

2 12.

MNB

8 52 104 38 16 13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/