Bore Size: 6mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Metal Stopper, Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Metal Stopper, Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Bore Size: 6mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Bore Size: 6mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Smooth Cylinder/Low Speed Cylinder

9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Made to Order

(A: 25 mm, B: 50 mm) CA2 series 40 50 63 80 100 9 8 36 8 M12 x 1.25 171 Width across flats ka 11 13 42 8 M16 x 1.5 190 MM 11 17 44 8 M20 x 1.5 200 15 19 54 10 M24 x 1.5 241 15 19 55.5 10 M24 x 1.5 253.5 CA2K, CBA2 (With lock on rod side only) (mm) Bore size (mm) b c d ka MM ZZ ZZ + Stroke + Adjustment d + Adjustment b c 40 50 63 80 100 9 11 44 8 M16 x 1.5 179 11 11 42 8 M16 x 1.5 190 CS1

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-9-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-9-10 11 Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7 How to Order CRB2 CRBU2 MSQA A M9B 1 High precision type CRB1 MSQB A M9B 1 Basic type MSU Number of auto

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Rotary Actuator/Vane Type

, 6 11 to 22 X-2 3, 4, 5, 6 MSQ MSZ CRQ2X MSQX Symbol: A9 Symbol: A10 MRQ The long shaft can be further shortened by changing the length of the standard chamfer on the long shaft side.

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

MHZ

M9B Number of auto switches Clean Series 11-: Vacuum type Auto switch Bore size Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

MHZ

M9B Number of auto switches Clean Series 11-: Vacuum type Auto switch Bore size Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-J79C 11-11-20 Connector 11-11-21 D-F59/F5P/J51/J59 Grommet 11-11-22 D-S991/S992/S99V1/S99V2 11-11-22 D-T991/T992/T99V1/T99V2 11-11-22 D-S9P1/S9P2/S9PV1/S9PV2 Grommet 11-11-23 D-S791/S792 11-11-23 D-T791/T792 Direct 11-11-23 D-S7P1/S7P2 11-11-23 Connector D-T791C/T792C 11-11-30 D-F8N/F8P/F8B D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 11-11-31 Grommet 11-11-24 D-F79W

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.