Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Electric Actuator with Integrated Guide

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

K35-OMW0030

20 250 450 30 200 15 320 350 30 530 40 68 8-6-4.

Metal Seal/Rubber Seal Series VQ Body Ported

Dimensions Formula L1 = 16n + 29, L2 = 16n + 40 n: Station (Maximum 16 stations) n L 1 2 77 88 150 160.5 3 93 104 175 185.5 4 109 120 187.5 198 5 125 136 200 210.5 6 141 152 225 235.5 7 157 168 237.5 248 8 173 184 250 260.5 9 189 200 262.5 273 10 205 216 287.5 298 11 221 232 300 310.5 12 237 248 312.5 323 13 253 264 337.5 348 14 269 280 350 360.5 15 285 296 362.5 373 16 L1 L2 L3 L4 45 56

Support Guide/11-LEFG Series

32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207 330 6 2 300 11-LEFG32-S-250 400 257 380 11-LEFG32-S-300 450 307 430 11-LEFG32-S-350 500 357 480 8 3 450 11-LEFG32-S-400 550 407

IZx-OMT0049

How to Order . 11 1-1. System construction . 11 1-2. How to Order . 14 1-2-1. Product number for single unit (to order separately) . 15 1-2-2. Made to Order . 17 1-2-3. Accessories (ordered separately) . 18 1-2-4. Sold separately . 20 2. Procedures to Operation . 22 2-1. Flow chart to operation . 22 2-2. Initial setting (IZT41/42) Initial setting is not necessary for IZT40) . 22 3.

LEYx-OMZ0015

Note 11) Only when the motor option, "with lock", is selected. -8- [Product weight] [kg] Model LEY25 (Top/Parallel) LEY25D (in-line) Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 Incremental Encoder(S2) 1.3 1.4 1.6 1.8 2.0 2.2 2.3 2.5 2.7 1.3 1.4 1.6 1.8 2.0 2.2 2.4 2.5 2.7 Motor type Absolute Encoder(S6) 1.4 1.5 1.6 1.9 2.0 2.2 2.4 2.6 2.8 1.4 1.5 1.6 1.9

Air Cylinder

11 14 17 17 11 12 15 19 19 501 to 800 11 11 13 16 601 to 1200 601 to 1200 751 to 1400 751 to 1500 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot MM N P RT RY S (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 501 to 800 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 51 58 58 71 72 146 159 170 204 215 56 64 64 76 76 43 52

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

NCQ8

300 350 400 NCDQ8BZ150-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ200-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ250-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ300-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8BZ400-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC-1 3/8 1 1/2 1

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) Equation L1=16n+118.5 L2=16n+131 n: Station (Max. 20) L n 20 438.5 451 475 485.5 19 422.5 435 462.5 473 18 406.5 419 450 460.5 17 390.5 403 425 435.5 16 374.5 387 412.5 423 15 358.5 371 400 410.5 14 342.5 355 375 385.5 13 326.5 339 362.5 373 12 310.5 323 350 360.5 11 294.5 307 337.5

LEY-OM007

400 450 500 50 100 350 400 450 500 LEY25 LEY16 LEY32 LEY32 LEY25 LEY16 / P.38 6.3 <> NPNPNP LEY16B-100 NPN -11- 2.3. 28 28 29 30 29 30 / 14 14 15 15 25 26 27 25 26 27 11 11 12 12 19 19 21 21 18 18 16 16 22 22 24 24 17 17 12 13 12 13 23 23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10

VQC

B 23 () (+) Gray Red 11 () (+) White Red AXT100-DS25-050 SOL. A When using a standard commercial connector, use a type 25P female connector conforming to MIL-C-24308. Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL.

Fieldbus System

Note 2) Refer to page 11 for dimensions of D-sub communication connector, external pilot and built-in silencer.

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

MGC

, 400 MGCM Slide bearing Data 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

0.4

Station 9 SQ SOL.B SOL.A 23 10 Station 10 SOL.A VFS SOL.B 24 11 Station 11 SOL.B SOL.A 25 12 Station 12 VFR VV5Q21 COM. () Orange Red (+) 13 VQ7 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 419.)

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT . 11-2 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative