Compact 5-Port Solenoid Valve

This allows for space saving , weight reduction , and a large flow rate . 1 The cylinder speed is 300 mm/s.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Manual override A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof connector 53.5 48.5 24.5 16.5 11 11 7.5 1/8 (Piping port) 20.5 268 Single Unit/Sub-plate Type 10-SV Dimensions: Series 10-SV2000 2 position single/double, 4 position dual 3 port [M12 waterproof connector type]

Cylinder with Lock

63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

CM2

16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32 With Rod Boot l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131

VK3000

Type of actuation Plug Plug JIS symbol 3-2-1 Series VK3000 How to Order Electrical entry G: Grommet (Lead wire length: 300 mm) D: DIN terminal H: Grommet (Lead wire length: 600 mm) DO: DIN terminal (Without connector) For connector part number, refer to page 3-2-11.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

MHY2/MHW2

D-Y7 W (V) 5 6 A B D-Y 9 Red light at ON Green light at ON Red light at ON Green light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 6 15 5 11 4 5 11 4 9 2 4 9 3 7 2 3 6 2 5 2 3 5 2 4 2.8-24

Electric Rotary Table

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

AC

gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 53 70 75 90 95 106 106 106 106 106 11 11 11 11 11 25 18 16 35 35 66 66 66 66 66 70 70 70 70 70 210 210 210 210 210 90 90 90 90 90 13 13 13 13 13 3.2

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 l3 l1 Single clevis with ball joint

10

300 300 280 G1/2 25 32 D side port does not have a plug.

76

Dimensions [Separately installed power transformer] C E IDF-TR7000-8 G B D 4 x F A Specications/Dimensions in (mm) Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight 14.2 (360) 21.3 (540) 15.7 (400) 10.2 (260) 11.8 (300) 0.43 (11) 1.18 (30) 207 lb (94 kg) IDF-TR7000-8 IDF100FS 7 kVA Three-phase Compound winding 220, 240 380, 400, 415 440 V (50/60

Vacuum System Peripherals:

) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve

Sine Cylinder Series REC

17 19 21 0.3 G 7 11 13 13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

Sine Cylinder Series REC

17 19 21 0.3 G 7 11 13 13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

Sine Cylinder Series REC

17 19 21 0.3 G 7 11 13 13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

Flow Sensor Series PFMV

Panel fitting dimensions Secure mounting of n pcs. (2 or more) switches (Horizontal) 1 pc. 24 or more 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less Secure mounting of n pcs. (2 or more) switches (Vertical) 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) PFM PFMV PF2A PF2W PF2D IF 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less

5 Port Air Operated Valve Series VFA3000 1

Refer to page 5-11-4.) Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

180° Angular Style Air Gripper Series MHY2/MHW2

(PAT.PEND) Over length L(mm) Gripping moment Mass (g) Bore size (mm) Model (Nm) L MHW2-20D 300 68 20 0.30 MHW2-25D 510 25 0.73 78 905 MHW2-32D 32 93.5 1.61 2135 MHW2-40D 117.5 40 3.70 5100 Auto switch mounting at 4 locations MHW2-50D 154 50 8.27 At the pressure of 0.5 MPa Two finger styles available.