Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

panel,s protective earth (PE).

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

=Fo-r-s-:-ta-n~d:-a-rd;-:*~*7"1:-:-ty-p-e-m-o-d:-u;-le-s 02 2 stations X200 For AB2 modules .The use of serial interface Sl module must be ornerd separately technology offers advantages such as reduced wiring, quicker installation time, easier start-up and simplified maintenance. 11 11 stations Includes 1 station to mount 81 unit.

CNG

Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) 1000 1000 Maximum speed: V (mm/s) 9-5-7 8 Cylinder with Lock Double Acting, Single Rod Series CNG

Environment

300 400 500 600 700 800 900 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] Servo Motor (24 VDC) The following graph shows the values when moving force is 250%.

5

58 M8 x 1.25 depth 16 7 18 M18 x 1.5 55 63 35 32 27 38 20 32 2 58 11 72 M10 x 1.5 depth 16 7 18 M18 x 1.5 69 80 40 37 32 50 25 40 3 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 86 100 40 37 41 60 30 50 3 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 106 (mm) Bore size (mm) Stroke range (mm) S TA TB ZZ Rc, NPT port G port GA GB P GA GB P 20 77 11 11 114 12 12 1/8 12 12 M5 x 0.8 25 77 11 11

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

CM2

#11, #7 SCM220A, #11, #7, #19 CM2D25SCM225A, #11 SCM225A, #11, #7 SCM225A, #11, #7, #19 CM2D32SCM232A, #11 SCM232A, #11, #7 SCM232A, #11, #7, #19 CM2D40SCM240A, #11 SCM240A, #11, #7 SCM240A, #11, #7, #19 1.4-44 Series CM2 Front Trunnion (U) CM2U Bore size Stroke S T (mm) B1 N P Bore K MM NA NN E B2 D I A TD F AL TT G TX H TY H1 TZ Z 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 15.5 13

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

MB1

(Refer to Rod boot/Air cushion on page 11.)

4/5 Port Solenoid Valve

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

CNG

0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 165 A ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod C96 Series Dimensions Basic: C96S (D) B C (J) W Bore size Stroke 32, 40 C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K

Table of Contents

50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Cylinder with Lock Series CNG

100 0.5 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP

CG1

1 to 50st 51 to 100st 101 to 125st 126 to 200st Bore (mm) 20 25 32 40 TA TB TC ZZ 211 213 230 ZZ 181 186 188 205 S 144 144 146 153 ZZ 156 161 163 180 S 119 119 121 128 ZZ 131 136 138 155 S 94 94 96 103 169 171 178 11 11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.

AC Servo Motor Driver

[s] te : Delay time of control section . [s] For 7kW or lower servo, there is internal relay delay time of about 10ms. For 11k to 22kW servo, there is delay caused by magnetic contactor built into the external dynamic brake (about 50ms) and delay caused by the external relay. 11 5 11.

0.4

Series SQ2000 Series SQ1000 C 6 10 16 20 25 32 40 Series CM2 Bore size (mm) 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Average speed (mm/s) 800 700 600 500 400 300 200 100 0 Average speed (mm/s) Series CJ2 kit Series CJ2 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation Perpendicular, upward actuation Horizontal actuation How to Increase Manifold Stations

Electric Rotary Table

W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) Features 12 Series Variations Electric Rotary Table Series LER Max. speed [/s] Positioning repeatability [] Controller /Driver series Rotating torque [Nm] Reference page Type Basic High torque Basic High torque Basic High torque LER10 0.2 0.3 Series LECP6 280 420 0.05 (End: 0.01) Series LECP1

5 Port Solenoid Valve

L4 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 337.5 350 362.5 375 400 412.5 425 437.5 462.5 475 487.5 L5 13.5 12 16.5 14.5 13 17.5 15.5 14 12 16.5 15 13 17.5 16 14 12.5 17 15 13.5 11.5 16 14.5 12.5 10 Series SY3000/5000 Dimensions: Type 11/For EX260/Series SY5000 (mm) SS5Y5-11SllStations (S, R) U D B C4, N3 C6, N7 C8, N9 Manual override D side U side Silencer (exhaust port

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175