MXQ

Table (4) Maximum Allowable Moment: Mmax (Nm) 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) 20 Model 10 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

Electric Actuators

0 300 0 50 100 150 200 250 200 250 Speed [mm/s] Speed [mm/s] LEPY10(L) (Basic/Compact) Horizontal Vertical 5.5 5.5 Lead 5 (LEPY10K) 4.4 4.4 Lead 5 (LEPY10K) Work load [lb] Work load [lb] 3.3 3.3 Lead 10 (LEPY10J) 2.2 2.2 Lead 10 (LEPY10J) 1.1 1.1 0 350 300 0 50 100 150 0 350 300 0 50 100 150 200 250 200 250 Speed [mm/s] Speed [mm/s] 3 Model Selection Series LEPY Force Conversion Graph (Guide

Refrigerated Air Dryers Series IDF/IDU

Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

AC Servo Motor Driver

[s] te : Delay time of control section . [s] For 7kW or lower servo, there is internal relay delay time of about 10ms. For 11k to 22kW servo, there is delay caused by magnetic contactor built into the external dynamic brake (about 50ms) and delay caused by the external relay. 11 5 11.

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

JXCx-OMT0023

11 11.

High Vacuum Angle Valve

Specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Valve type Inert gas under vacuum Fluid (C) 5 to 150 Operating pressure (Pa) (abs) 10-6 to atmospheric pressure Conductance (L/s) Note 1) 80 45 14 5 In case of standard material FKM: 1.3 x 10-10 at normal temperature, excluding gas permeation Internal Leakage (Pam3/s) In case of standard material FKM: 1.3 x 10-11 at normal temperature, excluding

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

LX

(B contact) Standard stroke 50 1.9 75 2.1 100 2.3 125 2.5 150 2.7 mm kg C kg mm/s mm N.C. (B contact) N.O. (A contact) Body weight N.C.

C76

100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125 40 12.5 25 37.5 50 75 100 125 6-10-11 12 Series C76 Dimensions with Mounting Bracket [First angle projection] Double acting, Single rod Rod foot (Flange): C76F32A, C76F40A LT W TF

C76

10 23.8 58 9 14 30 G 1/8 37.5 12 M30 x 1.5 20 57 45 42.5 M10 x 1 19 42.5 22 8 50 M12 x 1.75 14.2 12 28.3 69 12 16 35 G 1/8 46.5 14 M38 x 1.5 24 40 ZZ S XC Item 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97 (122) 147 172 172 197 197

7.5

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Angle Weight (g) Load (kN) Bore size (mm) 32 40 50, 63 80, 100 125 JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 M10 x 1.25 49.5 19.5 70 2.5 24 5 8 8 17 9 0.5 M12 x 1.25 60 20 160 4.4 31 6 11 11 22 13 0.75 0.5 M16 x 1.5 71.5 22 300 11 41 7.5 14 13.5 27 15 1 M20 x 1.5 101 28 1080 31 18 59.5 11.5 24 16 32 18 2 M27 x 2 123 34 1500 38 28 66 13 27 20 41 24 2 Black color Rod

Air Slide Table

11 13 13 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 42 41 42 41 23 31 31 31 31 41 36 19 19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.

JA/JAH/JB/JS

46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6

JA/JAH/JB/JS

12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17

45

L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 M3 Terminal screw A: Orange B: Green 150 162.5 175 175 187.5 200 212.5 225 129 139.5 150 160.5 171 181.5 192 202.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 (Rail mounting hole pitch 12.5) Stations n 10 stations 11 12 13 14 15 16 17 stations 248 248 260.5 273 285.5 298 310.5 310.5 L1 L2 L3 L4 237.5 237.5 250 262.5 275 287.5 300 300 213 223.5