0.4

Series SQ2000 Series SQ1000 C 6 10 16 20 25 32 40 Series CM2 Bore size (mm) 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Average speed (mm/s) 800 700 600 500 400 300 200 100 0 Average speed (mm/s) Series CJ2 kit Series CJ2 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation Perpendicular, upward actuation Horizontal actuation How to Increase Manifold Stations

CNA

100 100 Load weight m(kg) Load weight m(kg) 63 63 63 50 50 50 50 40 30 50 40 30 MLGC 40 40 40 CNA 20 20 10 10 CB 5 4 3 5 4 3 CV/MVG 2 2 CXW 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CXS Max. speed V(mm/s) Max. speed V(mm/s) CXT Graph n Graph c 0.4MPa P < 0.5MPa 0.4MPa P < 0.5MPa 1000 1000 MX 100 100 100 500 400 300 500 400 300 80 80 80 MXU 100 100 100 63 63 63 200 200

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 7 Cushion ring B Aluminum alloy 8 Cushion seal holder Aluminum alloy 32 to 100 9 Tie-rod Carbon steel 10 Tie-rod nut Steel 11 Flat washer Steel 80, 100 12 Rod end nut Steel Seal Kit (Double rod) 13 Cushion valve Resin 32 to 100 Bore size [mm] Kit no.

24

less, V = 400 mm/s (10) Over 30 stroke, V = 400 mm/s 10 1 5 0.5 25 25 20 Load mass m [kg] Load mass m [kg] 20 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance L [mm] Eccentric distance L [mm] MGPL32 to 100, MGPA32 to 100 (11) 50 stroke or less, V = 400 mm/s (12) Over 50 stroke, V = 400 mm/s 100 100 100 50 50 80 100 80 63 10 63 Load mass m [kg] Load mass m [kg] 50

AS

A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5 (32.8) 36.6 35

Cylinder with Lock

1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg

Cylinder with Lock

) Maximum speed: V (mm/s) Chart (6) Chart (3) 58 psi P < 73 psi 58 psi P < 73 psi 1000 1000 100 500 400 300 500 400 300 80 100 63 200 200 50 40 80 100 100 63 50 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 40 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Chart (7) Chart (4) 73 psi

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Max. 20 stations) Note) Indicate "Nil" for types T, T1, and S.

C85

32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105

Table of Contents

50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

CRB2/CRBU2/CRB1

Volume Double vane Single vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model Rotation 90 180 270 90 180 270 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 90 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 Volume

C85

32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Sine Rodless Cylinder Series REA/REB

cylinder shaft center Lo (cm) CY Distance from cylinder shaft center Lo (cm) 63 CX REA63 100 80 1000 REA50 MQ 50 40 30 REA40 500 400 RHC REA32 Load mass W (kg) 300 20 REA25 RZQ 200 10 100 Usable range 30 40 50 D-X 20 1 100 200 300 Individual -X 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Maximum speed U (mm/s) Distance from cylinder shaft center Lo (

SQ1000/2000

check valve (-B) SSQ2000-BP Built-in silencer (-S) P. 100 P. 99 P. 101 P. 103 C8 L8 Terminal number D-sub connector SOL.

MG

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 (11) 50 Stroke or Less, V = 400 mm/s (12) Over 50 Stroke, V = 400 mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg

Programless controller Step motor (servo 24 VDC)

40 700 8 45 800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70 1600 70 1600 80 1600 80 1600 14 75 1800 75 1800 90 1800 90 1800 15 80 2000 80 2000 100 2000 100 2000 LEHZ32 LEHZ40 speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 1 10 150 10 150

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details