Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

Air Slide Table

Table (4) Maximum Allowable Moment: Mmax (Nm) 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) 20 Model 10 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 0.2 MXQR 6 MXQR 8 MXQR12 MXQR16 MXQR20 MXQR25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 7.9 5.1 5.1 6.0 6.9 7.4 7.4 50 100 200 300 500 700 15 14 4.7 4.7 4.7 7.2 7.2 15 11 11

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

CY1

, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25 depth 14 9.5 depth 6 25 30 85 16.5 13 16 6.6 54 113 35 65 100 26.5 70 130 65 30 35 109 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 32 35 100 19 16 16 6.6 60 118 35 80 106 29 80 135 73 35 40 129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

-CG1RN25 11-CG1RN32 11-CG1RN40 11-CG1RN50 11-CG1RN63 50 63 20 25 32 40 50 63 1/4 Non-lube Double acting, 25, 50, 75, 100, 125, 150 Single rod 25, 50, 75, 100, 125, 150, 200 1/8 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) Item 20 25 32 40 50 63 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63 1.5

AC Servo Motor Driver (CC-Link Type ）

6.1.13 Encoder output pulse . 6 -11 6.2 Gain/filter parameters (No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 11.

45

L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 M3 Terminal screw A: Orange B: Green 150 162.5 175 175 187.5 200 212.5 225 129 139.5 150 160.5 171 181.5 192 202.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 (Rail mounting hole pitch 12.5) Stations n 10 stations 11 12 13 14 15 16 17 stations 248 248 260.5 273 285.5 298 310.5 310.5 L1 L2 L3 L4 237.5 237.5 250 262.5 275 287.5 300 300 213 223.5

C76

Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 32 53.9 48.8 53.9 41.2 53.9 28.4 66.7 19.6 66.7 18.1 66.7 19.6 10, 25 50, 100 150, 200 250 78.5 72.6 78.5 63.7 78.5 49.0 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 40 Spring Extended (N) Spring force Bore size (mm) Standard stroke 10 25 50 100 150 200 250 Extended Retract Extended Retract Extended

C76

100 150 200 250 Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract Extended Retract 10, 25 50, 100 150, 200 66.7 56.3 66.7 40.7 66.7 14.7 66.7 19.6 66.7 18.1 66.7 19.6 32 10, 25 50, 100 150, 200 250 76.5 50 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 23.5 76.5 65.9 40 6-10-20 21 Series C76 Air Cylinder: Standard/Non-rotating Type Single

CATALOG VC10

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

HRX-OM-Q026

/300-A-20-, HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/

7.5

Switch (When equipped with switch) 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 L1 L2 L3 L4 210.5 223 235.5 235.5 248 248 260.5 198 210.5 160.5 173 173 185.5 198 148 160.5 200 212.5 225 225 237.5 237.5 250 187.5 200 162.5 175 187.5 137.5 150 150 162.5 186.2 193.7 201.2 208.7 216.2 223.7 231.2 148.7 156.2 163.7 171.2 178.7 126.2 133.7 141.2 118.7 14.5 17 13.5 16 12

MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

4/5 Port Solenoid Valve

11 11 11 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43