7.5

8.2 16 18 20.5 16 16 18 20.5 17 32 35 39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Compact Cylinder with Lock Series CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3 Universal 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With one-touch fitting For low speed control Port size Thread type M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics ASD230FM ASD330FM ASD430FM 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

0.55

) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 28 Series VPA300/500/700 Series VPA700/Body Ported/Dimensions Standard/VPA742-1l (-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) 1/8 12(PA) port NC 33 12 4.5

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)

KP/KPQ/KPG

-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

Series AS-FM/AS-M/ASD-FM

10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With One-touch fitting For low speed control Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32UNF) R NPT M5 x 0.8 10-32UNF 1/8 1/4 N Needle Valve/Flow Rate Characteristics ASD230FM ASD330FM ASD430FM 0.8 Upstream pressure 0.5MPa Upstream pressure 0.5MPa Upstream pressure 0.5MPa 50 10 20 0.15 0.3 Flow rate l/min

KP/KPQ/KPG

KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,