CG1

5.5 25 39 28 3.2 35.8 42 16 28 47.6 Up to 125 8 C95 10 5.5 30 43 33 3.2 39.8 42 20 28 45.5 53 Up to 200 10 10 6.6 35 40 4.5 49.4 48 22 28 54 54.5 67.7 Up to 200 12 C92 10 6.6 40 49 4.5 58.4 56 30 30 65.5 78.7 63.5 Up to 200 14 Consists of pins, flat washer and hexagon socket head cap bolt.

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

MB

152 177 202 150 227 50 139 56 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 50 139 61 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 125 10 75 27 30 120 130 140 20 40 60 80 100 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket Refer to Basic (B) for other dimensions and with rod boot.

HRX-OM-Q026

(HRSH100-A-20/40-, HRSH100-W-20/40-) 8.5.2 HRSH150/200-A-20/40HRSH150/200/250-W-20/400.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-17: Pump capacity (HRSH150/200-A-20/40-HRSH150/200/250-W-20/40-) 8.5 Pump

CM2

SCM220A, #10, #19 CM2E25SCM225A, #10 SCM225A, #10, #19 CM2E32SCM232A, #10 SCM232A, #10, #19 CM2E40SCM240A, #10 SCM240A, #10, #19 The data shows auto switch equipped styles.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 68 56 30 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 100 76 56 32 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 125 82 75 40 10 20 30 40 60 80 100 120 140 160 180 200 130 140 150 160 180 200 220 240 260 280

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

240

type LEPY Series Page 374 25 to 50 6.0 1.5 200 5 24 to 40 4.0 1.5 200 10 12.5 to 25 3.0 1.0 350 10 12 to 20 2.0 1.0 350 14 to 20 1.0 0.5 150 4 6 Slide table type LEPS Series 7 to 10 0.75 0.25 300 8 25 50 Page 383 25 to 50 2.0 1.5 200 5 24 to 40 2.0 1.5 200 10 12.5 to 25 1.5 1.0 350 10 12 to 20 1.5 1.0 350 370 LEPY/LEPS Series Mounting Variations Mounting from various directions Side mounting

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

200 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) 400 400 Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

V/100 pulses) (Note 1) 07 Servo motor-side droop pulses (10 V/1000 pulses) (Note 1) 08 Servo motor-side droop pulses (10 V/10 pulses) (Note 1) 09 Servo motor-side droop pulses (10 V/10 pulses) (Note 1) 0A Feedback position (10 V/1 Mpulses) (Note 1) 0B Feedback position (10 V/10 Mpulses) (Note 1) 0C Feedback position (10 V/100 Mpulses) (Note 1) 0D Bus voltage (+8 V/400 V, 200 V drivers) 0E

Air Cylinder Series CS1

BT-12 BT-12 BT-16 BT-18A BT-20 10 10 10 10 10 CJP 17 17 17 17 17 CJ2 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 7.5 13 12 7 8 CM2 D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL CG1 D-F5/J5/F5W D-J59W/F5BAL D-F5NTL/F59F BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 5 5 5.5 6 6 MB D-G39/K39 [Stainless Steel Mounting Screw Kit] 11 11 10 10

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

Series SV

30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

10 stations Rc 3/4 Note 1) Max. 10 stations.

AC Servo Motor Driver (CC-Link Type ）

4 10.

LG1H

LG1H/ Aluminum body With single end support and table moved to the end of the stroke W 10 50 Horizontal load 100% Horizontal load 50% 10 20 Amount of deflection (m) Horizontal Load point distance 1000 500 100 200 W 50 20 10 5 Lateral load 100% 1 2 Lateral load 50% Horizontal empty weight deflection Lateral empty weight deflection Load point distance Lateral 0.5 0.1 0.2 100 200 300 500 1000

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

Smooth Cylinder/Low Speed Cylinder

Vacuum port, Refief port 1 to 200 mm/s 0.5 to 200 mm/s 8 M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 REC M10 x 1.25 M10 x 1.25 +1.4 0 mm CY 1/8 1/8 1/4 1/4 M5 x 0.8 CX CX Precautions MQ RHC Be sure to read before handling.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.