Environment

Model LEY25A Stroke [mm] Note 1) 30, 50, 100, 150, 200 250, 300, 350, 400 LEF Work load [kg] Note 2) Horizontal (3000 [mm/s2]) 7 15 30 Vertical Note 14) (3000 [mm/s2]) 2 5 11 LEJ Pushing force [N] Note 3) Note 4) 18 to 35 37 to 72 66 to 130 Speed [mm/s] 2 to 400 1 to 200 1 to 100 Actuator specifications LEL Max. acceleration/deceleration [mm/s2] 3000 Pushing speed [mm/s] Note 5) 35 or less

Cylinder Positioner IP200 Series

SUP (SUP air) IN (SIG air) qInput chamber uDiaphragm A iDiaphragm B oSpool wFeedback spring EX OUT2 EX OUT1 eInput diaphragm yNozzle rConnecting rod tCylinder rod 152 Cylinder Positioner IP200 Series Dimensions 20 20 25 SIG OUT1 OUT2 20 25 2 x 6.6 OUT1 OUT2 IN side Rc1/4 38 60 50 SUP 31 35 135 + Stroke IP IP IW 97 1301 40 SUP AW 37 Rc1/4 M8 x 1.25 depth 15 IL1 66 62 + Stroke 80 IL2 Precautions

Air Cylinder

63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66

One-touch Fittings

Straight line Mounting pitch A Fig. 1 Recommended piping Unit: [mm] Tubing size Mounting pitch A Straight line length Nylon tubing Soft nylon tubing Polyurethane tubing 2 13 or more 10 or more 3.2, 1/8" 44 or more 35 or more 25 or more 16 or more 4, 5/32" 56 or more 44 or more 26 or more 20 or more 3/16" 67 or more 52 or more 38 or more 24 or more 6 84 or more 66 or more 39 or more 30 or

99

10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) 66

ChemicalThermo-con

OFF 1.4 (35) Power connector 0.08 (2) Model no. label (Heat exchanger) Model no. label (Controller) 3.0 (75) 1.1 (29) (1.6 (40)) Facility water outlet 3/8" x 1/4" Facility water inlet 3/8" x 1/4" Signal connector Power switch (0.8 (20)) 10.3 (263) 0.87 (22) DC connector 12.0 (305) (0.4(10)) 11.2 (285) 0.4 (10) Circulating fluid inlet Purge outlet (M5) 0.3 (7) 78.7 (2000) 1.26 (32) 2.6 (66

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

AMR3000 to 6000

Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121 131 161 51 61 66

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Manifold Regulator ARM1000/2000 Series

Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66

Compact manifold regulator ARM5 Series

Unit Representation Metric size Inch size Symbol Description Display unit for product name plate and pressure gauge: MPa Display unit for product name plate and pressure gauge: psi 4 6 4 6 Straight Elbow Straight Elbow Symbol Symbol Nil 5/32 1/4 5/32 1/4 Note) Z 04 05 16 17 54 55 66 67 Note) This option is available for use outside Japan only. (The SI units must be used in Japan.) 3.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(K) ARP40(K) 28.5 Note 2) 1/8 40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(K) ARP40(K) 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66

AR Series Modular Type Regulator

U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66

Speed Controller with Indicator

(37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) 3/8 19 16.6 55.4 54 50.2 48.8 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1 17 62 (61) AS42l1FSl-U04-16 16 23.8 34.8 47.7 (47.6) 32.7 20.6 66

ASP-X352

X352 ASP630F-U04-13-X352 45.7 9.4 16.1 11.6 45.5 51.1 1/8 Uni G 1/8 14.2 14 29.3 14 13.7 38.4 22.9 26.9 34.6 to 39.6 1/4 1/4 63.6 10.4 23 15.2 18.5 58 21 70.4 41.7 1/4 Uni G 1/4 17.9 18.7 46.4 34.7 28.2 36.7 to 41.7 8mm (5/16) 10mm 70.5 13.2 25 18.5 66.1 77.9 3/8 Uni G 3/8 23 24 23.1 44 20.8 54.1 43.9 32.6 41.9 to 46.9 3/8 12mm 79.4 18.7 29.8 20.9 80.3 87.5 1/2 Uni G 1/2 28.6 24 52.2 25.9 66

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1 17 62 (61) AS42l1FSl-U04-16 16 23.8 34.8 47.7 (47.6) 32.7 20.6 66